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US3497705A Expired / Lapsed US ⏱️ 0.0 years remaining

Mask alignment system using radial patterns and flying spot scanning

Assignee: Northrop Grumman Guidance and Electronics Co Inc
•
Filing: 1968-02-12
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Granted: 1970-02-24
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Expires: 1988-02-12
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Abstract

No abstract record available.

Inventors

  • 👤 Alan J Adler

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 17:54
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G05; G05D; G05D3/00; G05D3/12; G05D3/14; H; H10; H10P; H10P72/00; H10P72/50; H10P72/53

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US3031135A Cited
US3138714A Cited
US3322935A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1973-02-23 1973-08-25 1974-02-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1977-02-23 1977-08-25 1978-02-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1981-02-23 1981-08-25 1982-02-24 $7700.00 Window Closed / Lapsed

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