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US4191964A Expired / Lapsed US ⏱️ 0.0 years remaining

Headless resistor

Assignee: National Semiconductor Corp
•
Filing: 1978-06-12
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Granted: 1980-03-04
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Expires: 1998-06-12
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Abstract

Abstract A diffused resistor included in a Schottky device formed in a planar semiconductor material comprises a resistor diffusion formed in the surface of the material and a contact diffusion formed in the surface of the material, the configuration of the contact diffusion being essentially coincident with the shape of the resistor at the location at which ohmic contact to the resistor diffusion is made.

Inventors

  • 👤 Rajni Kant

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 19:17
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/201; H10D84/204; H10D84/209; Y; Y10; Y10S; Y10S148/00; Y10S148/136

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 188 words
A diffused resistor formed in a body of semiconductor material, said semiconductor material having an impurity concentration of less than 10 17 atoms per cubic centimeter and having an overlying insulating layer, said diffused resistor comprising: a resistor diffusion formed in said semiconductor body; two contact diffusions formed in non-adjacent portions of said resistor diffusion, the configuration of said contact diffusions being substantially coincident with the shape of said resistor diffusion and adjacent said body of semiconductor material at the locations at which each of the contacts is made, said contact diffusion of such concentration to form an ohmic contact to a Schottky contact forming material; and two ohmic contacts of a Schottky contact forming material for ohmically contacting each of said contact diffusions, each of said ohmic contacts being substantially coincident with the corresponding contact diffusion, said two ohmic contacts being substantially coincident with the corresponding contact diffusion, said two ohmic contacts being formed at a temperature of less than 520° C. to thereby form a Schottky diode between any portion of said ohmic contacts which is formed in contact with any portion of said semiconductor body.
Claim 2
Dependent Claim 188 words
A diffused resistor formed in a body of semiconductor material, said semiconductor material having an impurity concentration of less than 10 17 atoms per cubic centimeter and having an overlying insulating layer, said diffused resistor comprising: a resistor diffusion formed in said semiconductor body; two contact diffusions formed in non-adjacent portions of said resistor diffusion, the configuration of said contact diffusions being substantially coincident with the shape of said resistor diffusion and adjacent said body of semiconductor material at the locations at which each of the contacts is made, said contact diffusion of such concentration to form an ohmic contact to a Schottky contact forming material; and two ohmic contacts of a Schottky contact forming material for ohmically contacting each of said contact diffusions, each of said ohmic contacts being substantially coincident with the corresponding contact diffusion, said two ohmic contacts being substantially coincident with the corresponding contact diffusion, said two ohmic contacts being formed at a temperature of less than 520° C. to thereby form a Schottky diode between any portion of said ohmic contacts which is formed in contact with any portion of said semiconductor body.
Claim 3
Dependent Claim 27 words
The diffused resistor of claim 1 wherein said resistor diffusion is linearly disposed and said contact diffusions coincide, respectively, with the oppisite ends of said resistor diffusion.
Claim 4
Dependent Claim 75 words
The diffused resistor of claim 2 wherein said substrate comprises an epitaxial layer of silicon formed upon a bulk silicon substrate, the epitaxial layer is of n type conductivity with a resistivity between 0.1 and 1 Ω-cm, and resistor diffusion is of p type conductivity with a sheet resistivity of greater than 900 Ω/ , and said contact diffusion is of p + type conductivity with a sheet resistance of less than 500 Ω/ .
Claim 5
Dependent Claim 20 words
The diffused resistor of claim 3 wherein said metal contacts are formed at a temperature of less than 520° C.
Claim 6
Dependent Claim 171 words
A diffused resistor formed in a body of semiconductor material, said semiconductor material having a resistivity greater than 0.1 ohm centimeter and having an overlying insulating layer, said diffused resistor comprising: a resistor diffusion formed in said semiconductor body; two contact diffusions formed in non-adjacent portions of said resistor diffusion, the configuration of said contact diffusions being substantially coincident with the shape of said resistor diffusion and adjacent said body of semiconductor material at the locations at which each of the contacts is made, said contact diffusion of such concentration to form an ohmic contact to a Schottky contact forming material; and two ohmic contacts of a Schottky contact forming material for ohmically contacting each of said contact diffusions, each of said ohmic contacts being substantially coincident with the corresponding contact diffusion, said two ohmic contacts being formed at a temperature of less than 520° C. to thereby form a Schottky diode between any portion of said ohmic contacts which is formed in contact with any portion of said semiconductor body.
Claim 7
Dependent Claim 171 words
A diffused resistor formed in a body of semiconductor material, said semiconductor material having a resistivity greater than 0.1 ohm centimeter and having an overlying insulating layer, said diffused resistor comprising: a resistor diffusion formed in said semiconductor body; two contact diffusions formed in non-adjacent portions of said resistor diffusion, the configuration of said contact diffusions being substantially coincident with the shape of said resistor diffusion and adjacent said body of semiconductor material at the locations at which each of the contacts is made, said contact diffusion of such concentration to form an ohmic contact to a Schottky contact forming material; and two ohmic contacts of a Schottky contact forming material for ohmically contacting each of said contact diffusions, each of said ohmic contacts being substantially coincident with the corresponding contact diffusion, said two ohmic contacts being formed at a temperature of less than 520° C. to thereby form a Schottky diode between any portion of said ohmic contacts which is formed in contact with any portion of said semiconductor body.

References Cited (Backward Citations)

US3615932A Cited
US3683306A Cited
US3879236A Cited
US3860465A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-03-04 1983-09-03 1984-03-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-03-04 1987-09-03 1988-03-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-03-04 1991-09-03 1992-03-04 $7700.00 Window Closed / Lapsed

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