US4183781A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stabilization process for aluminum microcircuits which have been reactive-ion etched
Assignee: International Business Machines Corp
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Filing: 1978-09-25
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Granted: 1980-01-15
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Expires: 1998-09-25
Abstract
Abstract Aluminum microcircuits which have been prepared by reactive-ion etching are stabilized against open circuits and short circuits by treating the microcircuits in an oxygen-containing atmosphere at a temperature of from about 200° C. to about 450° C.
Inventors
- 👤 Jerome M. Eldridge
- 👤 Wen-yaung Lee
- 👤 Geraldine C. Schwartz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:40
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6314; C; C23; C23C; C23C8/00; C23C8/06; C23C8/08; C23C8/10; C23C8/12; H10P14/6322; H10P70/00; H10P70/20; H10P70/27; H10P70/273; H10P95/00
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
53 words
In a process for forming an aluminum microcircuit on a substrate by the use of reactive-ion etching, the improvement according to which long term stability is imparted to the etched microcircuit by heating it in the presence of an oxygen containing atmosphere at a temperature from about 200° C. to about 450° C.
Claim 2
Dependent Claim
53 words
In a process for forming an aluminum microcircuit on a substrate by the use of reactive-ion etching, the improvement according to which long term stability is imparted to the etched microcircuit by heating it in the presence of an oxygen containing atmosphere at a temperature from about 200° C. to about 450° C.
Claim 3
Dependent Claim
27 words
The process as claimed in claim 1 wherein the heating is conducted at 350° C. for at least one-half hour under one atmosphere pressure of oxygen gas.
Claim 4
Dependent Claim
25 words
A process as claimed in claim 1 wherein the aluminum is present in the form of an alloy which is 96% aluminum and 4% copper.
Claim 5
Dependent Claim
21 words
A process as claimed in claim 2 wherein the aluminum is in the form of an alloy with copper and silicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-01-14 | 1983-07-16 | 1984-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-01-14 | 1987-07-16 | 1988-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-01-14 | 1991-07-16 | 1992-01-15 | $7700.00 | Window Closed / Lapsed |