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US4181860A
Expired / Lapsed
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Radiant beam exposure method
Assignee: Toshiba Corp
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Filing: 1978-01-31
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Granted: 1980-01-01
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Expires: 1998-01-31
Abstract
Abstract A radiant beam exposure method is provided in which an IC pattern is depicted on a semiconductor pellet with the IC pattern being divided into a plurality of pattern sections. Each of the pattern sections is depicted with a number of scanning lines traversing it. Each of the scanning lines corresponds to a train of bits representing a part of the pattern section. The pattern bit train is provided at at least one end with a bit representing jointing portion. The jointing bit is used to joint divided pattern sections.
Inventors
- 👤 Masahiko Sumi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/3026
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
169 words
A radiant beam exposure method for depicting a given pattern by a number of scanning lines of a radiant electron beam comprising the steps of: dividing the given pattern into a number of pattern sections, converting each of the pattern sections into a plurality of pattern information bit trains which correspond to the scanning lines, respectively, and are each provided at least one end with a jointing information bit; storing into a memory device pattern information corresponding to the given pattern in the form of said pattern information bit trains; selectively reading out the pattern information stored; converting the pattern information bit trains of the pattern information read out into a blanking signal; and applying the blanking signal into radiant beam emitting means whereby the radiant electron beam is controlled by the blanking signal and a jointing portion corresponding to the jointing information bit is formed at least one end of the pattern section depicted by the electron beam scanning, the jointing portion ensuring jointing between adjacent pattern sections.
Claim 2
Dependent Claim
169 words
A radiant beam exposure method for depicting a given pattern by a number of scanning lines of a radiant electron beam comprising the steps of: dividing the given pattern into a number of pattern sections, converting each of the pattern sections into a plurality of pattern information bit trains which correspond to the scanning lines, respectively, and are each provided at least one end with a jointing information bit; storing into a memory device pattern information corresponding to the given pattern in the form of said pattern information bit trains; selectively reading out the pattern information stored; converting the pattern information bit trains of the pattern information read out into a blanking signal; and applying the blanking signal into radiant beam emitting means whereby the radiant electron beam is controlled by the blanking signal and a jointing portion corresponding to the jointing information bit is formed at least one end of the pattern section depicted by the electron beam scanning, the jointing portion ensuring jointing between adjacent pattern sections.
Claim 3
Dependent Claim
35 words
A radiant beam exposure method according to claim 1, in which said pattern information bit train is comprised of a number of binary digits disposed in accordance with the pattern corresponding to one scanning line.
Claim 4
Dependent Claim
27 words
A radiant beam exposure method according to claim 1, in which said jointing information bit provides a jointing pattern in response to binary digit "1" or "0".
Claim 5
Dependent Claim
85 words
A radiant beam exposure method according to claim 1, in which the pattern corresponding to one scanning line includes a number of pattern elements, said pattern information bit train is comprised of a plurality of pattern information bits of which the number corresponds to the length of the scanning line, and the width of said jointing portion formed in response to said jointing information bit is narrower than that of one of the pattern elements formed in response to one of said pattern information bits.
Claim 6
Dependent Claim
27 words
A radiant beam exposure method according to claim 4, in which the width of said jointing portion is set up 1/2 of that of said pattern element.
Claim 7
Dependent Claim
39 words
A radiant beam exposure method according to claim 1, in which said jointing portion is formed by increasing the exposure amount of the radiant beam emitted from said radiant beam emitting means in response to said jointing information bit.
Claim 8
Dependent Claim
32 words
A radiant beam exposure method according to claim 1, in which said jointing portion is formed by a scanning line whose scanning speed is doubled in response to said jointing information bit.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-12-31 | 1983-07-02 | 1984-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-12-31 | 1987-07-02 | 1988-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-12-31 | 1991-07-02 | 1992-01-01 | $7700.00 | Window Closed / Lapsed |