US4172718A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ta-containing amorphous alloy layers and process for producing the same
Assignee: Siemens AG
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Filing: 1978-05-01
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Granted: 1979-10-30
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Expires: 1998-05-01
Abstract
Abstract An amorphous alloy layer comprised of Ta and another element selected from the group consisting of Ni, Co and N is formed by vapor deposition of the select elements onto a low temperature (below about -90° C.) substrate, such as glass. The resultant amorphous alloy layers are useful in thin film technology and are generally stable at room temperatures and up to about 300° C. while exhibiting a specific electrical resistance generally ranging from about 130 to 900 μΩ· cm and exhibit a relatively low temperature coefficient for such resistance, generally ranging from about -950 to +500 ppm/° K.
Inventors
- 👤 Guenther Menzel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:15
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; C23C14/06; C23C14/14
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
16 words
An amorphous alloy layer consisting of Ta and between about 20 to 80 atomic percent Co.
Claim 2
Dependent Claim
16 words
An amorphous alloy layer consisting of Ta and between about 20 to 80 atomic percent Co.
Claim 3
Dependent Claim
52 words
An amorphous alloy layer comprised of Ta and N, said layer being produced by generating Ta vapors in an operable vacuum environment having N 2 therein at a partial pressure of at least 6·10 -4 Pa. and depositing said Ta vapor onto a substrate cooled to at least below about -90° C.
Claim 4
Dependent Claim
52 words
An amorphous alloy layer comprised of Ta and N, said layer being produced by generating Ta vapors in an operable vacuum environment having N 2 therein at a partial pressure of at least 6·10 -4 Pa. and depositing said Ta vapor onto a substrate cooled to at least below about -90° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-10-29 | 1983-04-30 | 1983-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-10-29 | 1987-04-30 | 1987-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-10-29 | 1991-04-30 | 1991-10-30 | $7700.00 | Window Closed / Lapsed |