US4169068A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stripping liquor composition for removing photoresists comprising hydrogen peroxide
Assignee: JSR Corp
•
Filing: 1977-08-15
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Granted: 1979-09-25
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Expires: 1997-08-15
Abstract
Abstract A stripping liquor composition consisting essentially of (A) at least one compound selected from among sulfonic acids, acid esters of sulfuric acid, and acid esters of phosphoric acid, (B) hydrogen peroxide, and (C) at least one of organic solvents, with or without the addition of (D) at least one of polyhydric alcohols.
Inventors
- 👤 Yoshiyuki Harita
- 👤 Hideyuki Hanaoka
- 👤 Kunihiro Harada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 01:50
CPC Classifications
C; C11; C11D; C11D3/00; C11D3/43; C11D3/39; C11D3/3947; C23; C23G; C23G5/00; C23G5/02; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/423
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
34 words
A stripping liquor composition for polybutadiene resists consisting essentially of (A) at least one compound selected from the group consisting of alkylaryl sulfonic acids, (B) hydrogen peroxide, and (C) at least one organic solvent.
Claim 2
Dependent Claim
34 words
A stripping liquor composition for polybutadiene resists consisting essentially of (A) at least one compound selected from the group consisting of alkylaryl sulfonic acids, (B) hydrogen peroxide, and (C) at least one organic solvent.
Claim 3
Dependent Claim
40 words
A stripping liquor composition for polybutadiene resist consisting essentially of (A) at least one compound selected from the group consisting of alkylaryl sulfonic acids, (B) hydrogen peroxide, (C) at least one organic solvent, and (D) at least one polyhydric alcohol.
Claim 4
Dependent Claim
40 words
A stripping liquor composition for polybutadiene resist consisting essentially of (A) at least one compound selected from the group consisting of alkylaryl sulfonic acids, (B) hydrogen peroxide, (C) at least one organic solvent, and (D) at least one polyhydric alcohol.
Claim 5
Dependent Claim
24 words
A composition according to claim 2, wherein the ratio of the component (A) to the component (C) ranges from 50:50 to 10:90, (by weight).
Claim 6
Dependent Claim
34 words
A composition according to claim 2, wherein the components (D) and (B) are used in amounts from 1 to 10 percent by weight each of the combined amount of the components (A) and (C).
Claim 7
Dependent Claim
13 words
The composition of claim 3 wherein the ratio is from 40:60 to 25:75.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-09-24 | 1983-03-26 | 1983-09-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-09-24 | 1987-03-26 | 1987-09-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-09-24 | 1991-03-26 | 1991-09-25 | $7700.00 | Window Closed / Lapsed |