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US4161745A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor device having non-metallic connection zones

Assignee: US Philips Corp
•
Filing: 1977-09-27
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Granted: 1979-07-17
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Expires: 1997-09-27
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Abstract

Abstract A semiconductor device includes a silicon substrate having an insulating layer with a window. A silicon layer is deposited on the insulating layer and on the silicon substrate surface in the window. This silicon layer has n-type and p-type conductive layer parts which adjoin each other within the window and which each serve as both a connection conductor and an electrode of an active zone of the device. Semiconductor devices in accordance with the invention feature very small surface areas, and are thus particularly suitable for high frequency operation.

Inventors

  • 👤 Arie Slob

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 09:33
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0113; H10D62/00; H10D62/10; H10D62/13; H10D62/133; H10P; H10P14/00; H10P14/20; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4451; H10W72/00; H10W72/90; H10W72/50; H10W72/531; H10W72/536; H10W72/59

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 187 words
A semiconductor device having a semiconductor body of monocrystalline silicon, which device comprises at least one semiconductor circuit element having at least first and second active zones of opposite type conductivities, an electrically insulating layer provided on the surface of said semiconductor body and having at least one window, and a silicon layer which extends on the insulating layer and on the silicon surface within the window and which comprises a first layer part of a first type conductivity and a second layer part of a second type conductivity opposite to that of the first and adjoining said first layer part at least within the window, the first layer part of the silicon layer within the window forming an electrode and the first layer part outside the window on the insulating layer forming a connection conductor of said first active zone of the first type conductivity, and the second layer part of the silicon layer within the window forming an electrode and the second layer part outside the window on the insulating layer forming a connection conductor of said second active zone of the second type conductivity.
Claim 2
Dependent Claim 187 words
A semiconductor device having a semiconductor body of monocrystalline silicon, which device comprises at least one semiconductor circuit element having at least first and second active zones of opposite type conductivities, an electrically insulating layer provided on the surface of said semiconductor body and having at least one window, and a silicon layer which extends on the insulating layer and on the silicon surface within the window and which comprises a first layer part of a first type conductivity and a second layer part of a second type conductivity opposite to that of the first and adjoining said first layer part at least within the window, the first layer part of the silicon layer within the window forming an electrode and the first layer part outside the window on the insulating layer forming a connection conductor of said first active zone of the first type conductivity, and the second layer part of the silicon layer within the window forming an electrode and the second layer part outside the window on the insulating layer forming a connection conductor of said second active zone of the second type conductivity.
Claim 3
Dependent Claim 17 words
A semiconductor device as claimed in claim 1, wherein the silicon layer consists entirely of polycrystalline material.
Claim 4
Dependent Claim 33 words
A semiconductor device as claimed in claim 1, wherein the silicon layer within the window consists of monocrystalline material grown epitaxially on said semiconductor surface, and outside the window consists of polycrystalline material.
Claim 5
Dependent Claim 39 words
A semiconductor device as claimed in claim 1, wherein the second active zone is a zone of the silicon body adjoining the surface within the window and forming a p-n junction with the adjoining part of the semiconductor body.
Claim 6
Dependent Claim 22 words
A semiconductor device as claimed in claim 4, wherein the second active zone is substantially bounded by the edge of the window.
Claim 7
Dependent Claim 19 words
A semiconductor device as claimed in claim 5, wherein the second active zone is determined entirely by the window.
Claim 8
Dependent Claim 51 words
A semiconductor device as claimed in claim 1, wherein the first and second active zones form a p-n junction with each other of which a part extends in the semiconductor body and a part extends in the silicon layer, said parts merging into each other at the area of said surface.
Claim 9
Dependent Claim 28 words
A semiconductor device as claimed in claim 1, wherein the second active zone is situated between the first active zone and the adjoining part of the semiconductor body.
Claim 10
Dependent Claim 32 words
A semiconductor device as claimed in claim 8, wherein the first and second active zones with the underlying part of the semiconductor body form the three active zones of a bipolar transistor.
Claim 11
Dependent Claim 40 words
A semiconductor device as claimed in claim 3, wherein an active zone is formed by the monocrystalline portion of the part of the silicon layer which is situated within the window and has the conductivity type of said active zone.
Claim 12
Dependent Claim 36 words
A semiconductor device as claimed in claim 1, wherein one active zone has the form of a narrow strip which at said surface within the window is bounded on both sides by the other active zone.
Claim 13
Dependent Claim 33 words
A semiconductor device as claimed in claim 1, wherein the insulating layer is a silicon oxide layer which is sunk at least partly in the silicon body and is obtained by selective oxidation.
Claim 14
Dependent Claim 61 words
A semiconductor device as claimed in claim 1, wherein the silicon layer extends over substantially the whole surface of said silicon body and comprises doped parts of the first and of the second type conductivities, while the remaining part of the silicon layer has a sufficiently high resistivity such that it is substantially electrically insulating with respect to the doped parts.
Claim 15
Dependent Claim 17 words
A semiconductor device as claimed in claim 1, wherein the semiconductor circuit element comprises only one window.

References Cited (Backward Citations)

US3600651A Cited
US3758830A Cited
US3881242A Cited
US3837071A Cited
US3902188A Cited
US3980507A Cited
US4074304A Cited
US4062034A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1982-07-16 1983-01-15 1983-07-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1986-07-16 1987-01-15 1987-07-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1990-07-16 1991-01-15 1991-07-17 $7700.00 Window Closed / Lapsed

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