Patent US4158140A successfully refreshed from Google Patents.
US4158140A
Expired / Lapsed
US
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Electron beam exposure apparatus
Assignee: Toshiba Corp
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Filing: 1978-06-15
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Granted: 1979-06-12
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Expires: 1998-06-15
Abstract
Abstract Disclosed is an electron beam exposure apparatus which comprises an electron gun to produce an electron beam, a mask plate with an aperture which passes the electron beam and forms a bundle of electron beam components with a sectional shape corresponding to the shape of the aperture, and an electron lens for converging the bundle of electron beam components and applying the bundle to a workpiece. The aperture includes a tapered plane across the thickness of the mask plate, the tapered plane facing the incidence side of the electron beam.
Inventors
- 👤 Mamoru Nakasuji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 08:57
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
86 words
An electron beam exposure apparatus comprising: an electron gun to produce an electron beam; a mask plate having an aperture which passes said electron beam and forms a bundle of electron beam components with a sectional shape corresponding to the shape of said aperture, said aperture including a tapered plane across the thickness of said mask plate, said tapered plane facing the incidence side of said electron beam; and a means for converging said bundle of electron beam components and applying said bundle to a workpiece.
Claim 2
Dependent Claim
86 words
An electron beam exposure apparatus comprising: an electron gun to produce an electron beam; a mask plate having an aperture which passes said electron beam and forms a bundle of electron beam components with a sectional shape corresponding to the shape of said aperture, said aperture including a tapered plane across the thickness of said mask plate, said tapered plane facing the incidence side of said electron beam; and a means for converging said bundle of electron beam components and applying said bundle to a workpiece.
Claim 3
Dependent Claim
32 words
An apparatus according to claim 1, wherein said tapered plane is inclined at an angle ranging from 45° to less than 90° as compared with the direction perpendicular to the optical axis.
Claim 4
Dependent Claim
13 words
An apparatus according to claim 2 wherein said angle is 54° to 85°.
Claim 5
Dependent Claim
22 words
An apparatus according to claim 2, wherein said means for converging said bundle of electron beam includes at least one electron lens.
Claim 6
Dependent Claim
25 words
An apparatus according to claim 4, wherein a blanking electrode for blanking the electron beam is interposed between said electron gun and said mask plate.
Claim 7
Dependent Claim
16 words
An apparatus according to claim 5, wherein said mask plate is built in an electron lens.
Claim 8
Dependent Claim
33 words
An apparatus according to claim 5 or 6, comprising a deflecting electrode for deflecting said bundle of electron beam which is disposed next to said means for converging said bundle of electron beam.
References Cited (Backward Citations)
US3707765A
Cited
US4122335A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-06-11 | 1982-12-11 | 1983-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-06-11 | 1986-12-11 | 1987-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-06-11 | 1990-12-11 | 1991-06-12 | $7700.00 | Window Closed / Lapsed |