Patent US4155784A successfully refreshed from Google Patents.
US4155784A
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Process for epitaxially growing a gallium arsenide layer having reduced silicon contaminants on a gallium arsenide substrate
Assignee: Northrop Grumman Space and Mission Systems Corp
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Filing: 1977-04-08
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Granted: 1979-05-22
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Expires: 1997-04-08
Abstract
Abstract A process for epitaxially forming a layer of gallium arsenide having a first conductivity on a substrate of gallium arsenide having a second conductivity in an enclosure having an inner liner comprised of a silicon compound, comprising decomposing arsine to form arsenic; chemically reacting a first quantity of hydrogen chloride and gallium to form gallium chloride, the gallium chloride reacting with the arsenic to form gallium arsenide on the substrate, a portion of the first quantity of hydrogen chloride remaining unreacted and tending to cause silicon contaminants from the liner to be deposited on the substrate; and providing a second quantity of hydrogen chloride into the enclosure which serves to initially etch, and hence clean, the outer surface of the substrate prior to the formation of gallium arsenide thereon, and simultaneously tends to inhibit the formation of silicon contaminants on the substrate, the second quantity and the first quantity having a preselected ratio such that the growth rate of the gallium arsenide layer on the substrate is greater than the etching rate of gallium arsenide due to the second quantity of hydrogen.
Inventors
- 👤 Thomas G. Mills
- 👤 Wallace T. Anderson, Jr.
- 👤 Arthur D. Herbig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:13
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/85; H10D62/854; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; Y; Y10; Y10S; Y10S117/00; Y10S117/90; Y10S117/906; Y10S148/00; Y10S148/056; Y10S148/065
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
195 words
A process for epitaxially depositing a gallium arsenide layer on a gallium arsenide substrate in a quartz furnace comprising the steps of: a. providing a gallium arsenide substrate in a quartz furnace; b. providing a gallium reservoir in the furnace; c. purging the furnace with a flow of molecular hydrogen; d. introducing hydrogen chloride having a mole fraction between approximately 2.67 × 10 -2 to approximately 1.75 × 10 -1 ; e. simultaneously introducing molecular hydrogen at a mole fraction of approximately 1.80 × 10 -1 and approximately 2.08 × 10 -1 ; f. simultaneously introducing arsine at a mole fraction between approximately 1.13 × 10 -2 and approximately 1.31 × 10 -2 ; g. maintaining a reaction zone proximate the gallium reservoir at a temperature that is greater than that proximate a buffer zone above the substrate introducing a quantity of hydrogen chloride into the gallium reservoir to form gallium chloride said gallium chloride reacting with said arsine, thereby epitaxially growing a gallium arsenide layer on the substrate; and h. continuing the epitaxial growth until a buffer layer is formed on the substrate and until an active layer is formed on the buffer layer.
Claim 2
Dependent Claim
195 words
A process for epitaxially depositing a gallium arsenide layer on a gallium arsenide substrate in a quartz furnace comprising the steps of: a. providing a gallium arsenide substrate in a quartz furnace; b. providing a gallium reservoir in the furnace; c. purging the furnace with a flow of molecular hydrogen; d. introducing hydrogen chloride having a mole fraction between approximately 2.67 × 10 -2 to approximately 1.75 × 10 -1 ; e. simultaneously introducing molecular hydrogen at a mole fraction of approximately 1.80 × 10 -1 and approximately 2.08 × 10 -1 ; f. simultaneously introducing arsine at a mole fraction between approximately 1.13 × 10 -2 and approximately 1.31 × 10 -2 ; g. maintaining a reaction zone proximate the gallium reservoir at a temperature that is greater than that proximate a buffer zone above the substrate introducing a quantity of hydrogen chloride into the gallium reservoir to form gallium chloride said gallium chloride reacting with said arsine, thereby epitaxially growing a gallium arsenide layer on the substrate; and h. continuing the epitaxial growth until a buffer layer is formed on the substrate and until an active layer is formed on the buffer layer.
Claim 3
Dependent Claim
24 words
A process as recited in claim 1 wherein said buffer layer is grown for a period of between about 10 and about 15 minutes.
Claim 4
Dependent Claim
30 words
A process as recited in claim 1 wherein the active layer is grown at a growth rate of between approximately 0.1 and approximately 0.3 × 10 -4 centimeter per minute.
Claim 5
Dependent Claim
122 words
A process for epitaxially forming a layer of gallium arsenide having a first conductivity on a substrate of gallium arsenide having a second conductivity in an enclosure having an inner liner comprised of a silicon compound, comprising: reacting hydrogen chloride with gallium to form gallium chloride; decomposing arsine to form arsenic, said gallium chloride reacting with said arsenic to form gallium arsenide on the substrate and said hydrogen chloride tending to cause silicon contaminants from the liner to be deposited on the substrate; and providing additional hydrogen chloride to the substrate to shift the equilibrium of said reaction to inhibit the formation of silicon on the substrate, thereby enabling the formation of a relatively pure layer of gallium arsenide on the substrate.
Claim 6
Dependent Claim
122 words
A process for epitaxially forming a layer of gallium arsenide having a first conductivity on a substrate of gallium arsenide having a second conductivity in an enclosure having an inner liner comprised of a silicon compound, comprising: reacting hydrogen chloride with gallium to form gallium chloride; decomposing arsine to form arsenic, said gallium chloride reacting with said arsenic to form gallium arsenide on the substrate and said hydrogen chloride tending to cause silicon contaminants from the liner to be deposited on the substrate; and providing additional hydrogen chloride to the substrate to shift the equilibrium of said reaction to inhibit the formation of silicon on the substrate, thereby enabling the formation of a relatively pure layer of gallium arsenide on the substrate.
Claim 7
Dependent Claim
21 words
A process as recited in claim 4 wherein the temperature of said gallium chloride is greater than that of the substrate.
Claim 8
Dependent Claim
38 words
A process as recited in claim 5 wherein the temperature of said gallium chloride is in the range between 750 and 776° C. and the temperature of the substrate is in the range between 600 and 750° C.
Claim 9
Dependent Claim
55 words
A process as recited in claim 4 wherein the layer serves as a buffer layer and further comprising the additional steps recited in claim 4 to form a second layer overlaying said buffer layer, said second layer being doped with sulfur so as to have a greater concentration of dopant atoms than said buffer layer.
Claim 10
Dependent Claim
26 words
A process as recited in claim 4 and further including the step of rotating the substrate so as to obtain a layer having generally uniform thickness.
Claim 11
Dependent Claim
188 words
A process for epitaxially forming a layer of gallium arsenide having a first conductivity on a substrate of gallium arsenide having a second conductivity in an enclosure having an inner liner comprised of a silicon compound, comprising: a. decomposing arsine to form arsenic; b. chemically reacting a first quantity of hydrogen chloride and gallium to form gallium chloride, said gallium chloride reacting with said arsenic to form gallium arsenide on the substrate, a portion of said first quantity of hydrogen chloride remaining unreacted and tending to cause silicon contaminants from the liner to be deposited on the substrate; and c. providing a second quantity of hydrogen chloride into said enclosure, said hydrogen chloride serving to initially etch, and hence clean, the outer surface of the substrate prior to the formation of gallium arsenide thereon, and simultaneously tending to inhibit the formation of silicon contaminants on the substrate, said second quantity and said first quantity having a preselected ratio such that the growth rate of the gallium arsenide layer on the substrate is greater than the etching rate of gallium arsenide due to the second quantity of hydrogen chloride.
Claim 12
Dependent Claim
188 words
A process for epitaxially forming a layer of gallium arsenide having a first conductivity on a substrate of gallium arsenide having a second conductivity in an enclosure having an inner liner comprised of a silicon compound, comprising: a. decomposing arsine to form arsenic; b. chemically reacting a first quantity of hydrogen chloride and gallium to form gallium chloride, said gallium chloride reacting with said arsenic to form gallium arsenide on the substrate, a portion of said first quantity of hydrogen chloride remaining unreacted and tending to cause silicon contaminants from the liner to be deposited on the substrate; and c. providing a second quantity of hydrogen chloride into said enclosure, said hydrogen chloride serving to initially etch, and hence clean, the outer surface of the substrate prior to the formation of gallium arsenide thereon, and simultaneously tending to inhibit the formation of silicon contaminants on the substrate, said second quantity and said first quantity having a preselected ratio such that the growth rate of the gallium arsenide layer on the substrate is greater than the etching rate of gallium arsenide due to the second quantity of hydrogen chloride.
Claim 13
Dependent Claim
20 words
A process as recited in claim 9 wherein the temperature of said gallium is greater than that of the substrate.
Claim 14
Dependent Claim
37 words
A process as recited in claim 10 wherein the temperature of said gallium is in the range between 750 and 776° C. and the temperature of the substrate is in the range between 600° and 750° C.
Claim 15
Dependent Claim
27 words
A process as recited in claim 9 and further comprising the step of rotating the substrate so as to obtain a layer having a generally uniform thickness.
Claim 16
Dependent Claim
55 words
A process as recited in claim 9 wherein the layer serves as a buffer layer and further comprising the additional steps recited in claim 9 to form a second layer overlaying said buffer layer, said second layer being doped with sulfur so as to have a greater concentration of dopant atoms than said buffer layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-05-21 | 1982-11-20 | 1983-05-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-05-21 | 1986-11-20 | 1987-05-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-05-21 | 1990-11-20 | 1991-05-22 | $7700.00 | Window Closed / Lapsed |