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US4123571A
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Method for forming smooth self limiting and pin hole free SiC films on Si
Assignee: International Business Machines Corp
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Filing: 1977-09-08
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Granted: 1978-10-31
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Expires: 1997-09-08
Abstract
Abstract The invention provides a method for forming a protective silicon carbide (SiC) film on a silicon (Si) substrate. The method permits the formation of silicon carbide on the Si substrate on all surfaces simultaneously. The process is highlighted in that the silicon substrate to be coated is placed in a susceptor having tantalum carbide surfaces and which has a high purity ambient. The substrate is heated at a temperature about 1250° C to remove native SiO 2 from its surface. The system is then cooled to a temperature of about 900° C and methane is added for about 30 minutes to thereby deposit a layer of carbon which is further reacted with the Si substrate at 1250° C to form a smooth, pin hole free SiC film. SiC layers are also formed by a one step reaction in which methane is reacted directly with Si at 1250° C.
Inventors
- 👤 Moshe Balog
- 👤 Melvin Berkenblit
- 👤 See-Ark Chan
- 👤 Arnold Reisman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:44
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/5053; C04B41/5057; C04B41/5059; C04B41/80; C04B41/81; C04B41/85; C04B41/87
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
187 words
A method for forming smooth, dense highly adherent and pin hole free SiC films on Si substrates comprising the steps of: (a) placing said Si substrates in a tantalum susceptor coated with tantalum carbide, said susceptor having the effect of floating within a reactor, (b) having said Si substrates at atmosphere pressure in a pure He ambient at a temperature and for a time sufficient to remove native SiO 2 from the surfaces of said substrates, (c) cooling the substrates to a temperature of about 900° C. (d) flowing a preheated CH 4 /He mixture into said reactor while maintaining said temperature at about 900° C. for a time sufficient to crack methane whereby a coating of C is deposited on said substrates, said CH 4 being present in the amount from about 0.8×10 -3 to about 2.4×10 -3 moles/liter of the mixture; (e) stopping the flow of CH 4 and heating said substrates in a pure He ambient to a temperature and for a time sufficient to form SiC films of desired thickness on said substrates; and thereafter (f) slowly cooling said substrates to room temperature.
Claim 2
Independent Claim
187 words
A method for forming smooth, dense highly adherent and pin hole free SiC films on Si substrates comprising the steps of: (a) placing said Si substrates in a tantalum susceptor coated with tantalum carbide, said susceptor having the effect of floating within a reactor, (b) having said Si substrates at atmosphere pressure in a pure He ambient at a temperature and for a time sufficient to remove native SiO 2 from the surfaces of said substrates, (c) cooling the substrates to a temperature of about 900° C. (d) flowing a preheated CH 4 /He mixture into said reactor while maintaining said temperature at about 900° C. for a time sufficient to crack methane whereby a coating of C is deposited on said substrates, said CH 4 being present in the amount from about 0.8×10 -3 to about 2.4×10 -3 moles/liter of the mixture; (e) stopping the flow of CH 4 and heating said substrates in a pure He ambient to a temperature and for a time sufficient to form SiC films of desired thickness on said substrates; and thereafter (f) slowly cooling said substrates to room temperature.
Claim 3
Dependent Claim
26 words
A method according to claim 1 wherein the substrates are heated in step b to a temperature of from about 1200° C. to about 1350° C.
Claim 4
Dependent Claim
27 words
A method according to claim 2 wherein the substrates are reheated in step e to a temperature range of from about 1200° C. to about 1350° C.
Claim 5
Dependent Claim
24 words
A method according to claim 3 wherein said substrates are heated in step b to a temperature of 1250° C. for about 10 minutes.
Claim 6
Dependent Claim
25 words
A method according to claim 4 wherein said substrates are reheated in step e for a period of from 10 min to about 720 min.
Claim 7
Dependent Claim
21 words
A method according to claim 5 wherein said substrates are reheated in step e to a temperature of about 1250° C.
Claim 8
Dependent Claim
20 words
A method according to claim 6 wherein said CH 4 is present in the concentration of about 2.4×10 -3 moles/liter.
Claim 9
Dependent Claim
23 words
A method according to claim 7 wherein said substrates are allowed to cool in step f over a period of about 2 hours.
Claim 10
Independent Claim
142 words
A method for forming smooth, dense, highly adherent and pin hole free SiC films on Si substrates comprising the steps of: (a) placing said Si substrates in a tantalum susceptor coated with tantalum carbide, said susceptor having the effect of floating within said reactor, (b) heating said substrates in a pure He ambients to a temperature and for a time sufficient to remove native SiO 2 from the surfaces of said substrates (c) flowing a preheated CH 4 /He mixture into said reactor while maintaining a temperature in the range of about 1200° C. to about 1350° C. and for a time sufficient to form SiC on the surfaces of said substrates, said CH 4 being present in the amount from about 0.8×10 -3 to about 2.4×10 -3 moles/liter of the mixture; and thereafter (d) slowly cooling said substrates to room temperature.
Claim 11
Independent Claim
142 words
A method for forming smooth, dense, highly adherent and pin hole free SiC films on Si substrates comprising the steps of: (a) placing said Si substrates in a tantalum susceptor coated with tantalum carbide, said susceptor having the effect of floating within said reactor, (b) heating said substrates in a pure He ambients to a temperature and for a time sufficient to remove native SiO 2 from the surfaces of said substrates (c) flowing a preheated CH 4 /He mixture into said reactor while maintaining a temperature in the range of about 1200° C. to about 1350° C. and for a time sufficient to form SiC on the surfaces of said substrates, said CH 4 being present in the amount from about 0.8×10 -3 to about 2.4×10 -3 moles/liter of the mixture; and thereafter (d) slowly cooling said substrates to room temperature.
Claim 12
Dependent Claim
27 words
A method according to claim 9 wherein the substrates are heated in step (b) to a temperature in the range of about 1200° C. to 1300° C.
Claim 13
Dependent Claim
21 words
A method according to claim 10 wherein said substrates are heated in step (b) to a temperature of about 1250° C.
Claim 14
Dependent Claim
21 words
A method according to claim 11 wherein said CH 4 is present in the concentration of about 1.6×10 -3 moles/ liter.
References Cited (Backward Citations)
GB1158637A
Cited
US3794516A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-10-30 | 1982-05-01 | 1982-10-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-10-30 | 1986-05-01 | 1986-10-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-10-30 | 1990-05-01 | 1990-10-31 | $7700.00 | Window Closed / Lapsed |