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US4110237A
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Compositions containing a diazine and a halogen compound for catalyzing copper etching solutions
Assignee: Adeka Corp
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Filing: 1977-06-28
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Granted: 1978-08-29
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Expires: 1997-06-28
Abstract
Abstract This invention provides copper and copper alloy etching solutions comprising a mixed aqueous solution of a peroxysulfate with a diazine compound and a halogen compound added as the catalyst. There is also provided a process for etching copper and copper alloys with said etching solutions.
Inventors
- 👤 Akira Matsumoto
- 👤 Katsutoshi Itani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 17:32
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; H05K3/06; H05K3/067; C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/16; C23F1/18
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
89 words
A composition for catalyzing peroxysulfate solutions for etching copper and copper alloys comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a halogen compound which liberates halogen in an aqueous solution, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline, and said halogen compound is a member selected from the group consisting of an alkali metal salt of a halogen acid, dichloroisocyanuric acid and salts thereof, and 1-chlorodiethylether.
Claim 2
Dependent Claim
89 words
A composition for catalyzing peroxysulfate solutions for etching copper and copper alloys comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a halogen compound which liberates halogen in an aqueous solution, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline, and said halogen compound is a member selected from the group consisting of an alkali metal salt of a halogen acid, dichloroisocyanuric acid and salts thereof, and 1-chlorodiethylether.
Claim 3
Dependent Claim
28 words
The composition of claim 1, containing from 100 to 2000 parts by weight of said diazine and from 10 to 1000 parts by weight of said halogen compound.
Claim 4
Dependent Claim
10 words
The composition of claim 1, wherein the diazine is pyrazine.
Claim 5
Dependent Claim
10 words
The composition of claim 1, wherein the diazine is 5-methylpyrimidine.
Claim 6
Dependent Claim
10 words
The composition of claim 1, wherein the diazine is phthalazine.
Claim 7
Dependent Claim
10 words
The composition of claim 1, wherein the diazine is pyrimidine.
Claim 8
Dependent Claim
50 words
A composition comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a sodium or potassium salt of a halogen acid, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline.
Claim 9
Dependent Claim
50 words
A composition comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a sodium or potassium salt of a halogen acid, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline.
Claim 10
Dependent Claim
15 words
A composition of claim 7, wherein the salt of a halogen acid is sodium cloride.
Claim 11
Dependent Claim
43 words
A composition comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of dichloroisocyanuric acid, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline.
Claim 12
Dependent Claim
43 words
A composition comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of dichloroisocyanuric acid, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline.
Claim 13
Dependent Claim
42 words
A composition comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of 1-chlorodiethylether, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline.
Claim 14
Dependent Claim
42 words
A composition comprising from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of 1-chlorodiethylether, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline.
Claim 15
Dependent Claim
91 words
A composition for catalyzing peroxysulfate solutions for etching copper and copper alloys consisting essentially of from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a halogen compound which liberates halogen in an aqueous solution, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline, and said halogen compound is a member selected from the group consisting of an alkali metal salt of a halogen acid, dichloroisocyanuric acid and salts thereof, and 1-chlorodiethylether.
Claim 16
Dependent Claim
91 words
A composition for catalyzing peroxysulfate solutions for etching copper and copper alloys consisting essentially of from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a halogen compound which liberates halogen in an aqueous solution, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline, and said halogen compound is a member selected from the group consisting of an alkali metal salt of a halogen acid, dichloroisocyanuric acid and salts thereof, and 1-chlorodiethylether.
Claim 17
Dependent Claim
81 words
A composition comprising a peroxysulfate, from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a halogen compound which liberates halogen in an aqueous solution, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline, and said halogen compound is a member selected from the group consisting of an alkali metal salt of a halogen acid, dichloroisocyanuric acid and salts thereof, and 1-chlorodiethylether.
Claim 18
Dependent Claim
81 words
A composition comprising a peroxysulfate, from 50 to 2000 parts by weight of a diazine and from 5 to 2000 parts by weight of a halogen compound which liberates halogen in an aqueous solution, said diazine being selected from the group consisting of pyrimidine, aminopyrimidine, methylpyrimidine, pyrazine, pyrazinecarboxamide, quinoxaline, pyridazine, phthalazine and cinnoline, and said halogen compound is a member selected from the group consisting of an alkali metal salt of a halogen acid, dichloroisocyanuric acid and salts thereof, and 1-chlorodiethylether.
Claim 19
Dependent Claim
37 words
The composition of claim 12, wherein the peroxysulfate is selected from the group consisting of an ammonium, potassium, sodium and lithium salt of peroxymonosulfuric acid and an ammonium, potassium, sodium, barium and lithium salt of peroxydisulfuric acid.
Claim 20
Dependent Claim
11 words
The composition of claim 12, wherein the peroxysulfate is ammonium peroxymonosulfate.
Claim 21
Dependent Claim
11 words
The composition of claim 12, wherein the peroxysulfate is ammonium peroxydisulfate.
Claim 22
Dependent Claim
22 words
An aqueous solution of claim 12, wherein the solution contains from 5 percent by weight to the solubility limit of said peroxysulfate.
Claim 23
Dependent Claim
23 words
An aqueous solution of claim 12, wherein the solution contains from 5 percent by weight to 25 percent by weight of said peroxysulfate.
Claim 24
Dependent Claim
10 words
The composition of claim 12, wherein the diazine is pyrazine.
Claim 25
Dependent Claim
10 words
The composition of claim 12, wherein the diazine is 5-methylpyrimidine.
Claim 26
Dependent Claim
10 words
The composition of claim 12, wherein the diazine is phthalazine.
Claim 27
Dependent Claim
10 words
The composition of claim 12, wherein the diazine is pyrimidine.
Claim 28
Dependent Claim
12 words
The composition of claim 12, wherein the halogen compound is sodium chloride.
Claim 29
Dependent Claim
12 words
The composition of claim 12, wherein the halogen compound is dichloroisocyanuric acid.
Claim 30
Dependent Claim
11 words
The composition of claim 12, wherein the halogen compound is 1-chlorodiethylether.
References Cited (Backward Citations)
US3948703A
Cited
US3936332A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-08-28 | 1982-02-27 | 1982-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-08-28 | 1986-02-27 | 1986-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-08-28 | 1990-02-27 | 1990-08-29 | $7700.00 | Window Closed / Lapsed |