US3948703A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of chemically polishing copper and copper alloy
Assignee: Adeka Corp
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Filing: 1973-11-26
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Granted: 1976-04-06
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Expires: 1993-11-26
Abstract
Abstract This invention provides a method of chemically polishing copper and copper alloys which comprises using a solution with one or more members selected from azoles having the structure represented by the general formulae ##SPC1## Wherein X, X' and X" represent any of hydrogen, amino, aminoalkyl containing 1-3 carbon atoms and alkyl containing 1-3 carbon atoms added to an acid aqueous solution of hydrogen peroxide containing hydrogen peroxide and sulfuric or nitric acid.
Inventors
- 👤 Kazuyoshi Kushibe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:46
CPC Classifications
C; C23; C23F; C23F3/00; C23F3/04; C23F3/06
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
66 words
Method of chemically polishing copper or a copper alloy which comprises contacting copper or a copper alloy with an aqueous solution containing one or more members selected from azoles having the structure represented by the general formulae ##SPC3## wherein X, X' and X" represent any of hydrogen, amino, aminoalkyl containing 1-3 carbon atoms and alkyl containig 1-3 carbon atoms, hydrogen peroxide, and sulfuric or nitric acid.
Claim 2
Dependent Claim
66 words
Method of chemically polishing copper or a copper alloy which comprises contacting copper or a copper alloy with an aqueous solution containing one or more members selected from azoles having the structure represented by the general formulae ##SPC3## wherein X, X' and X" represent any of hydrogen, amino, aminoalkyl containing 1-3 carbon atoms and alkyl containig 1-3 carbon atoms, hydrogen peroxide, and sulfuric or nitric acid.
Claim 3
Dependent Claim
30 words
Method according to claim 1 wherein the azoles are of the general formula (I) and are selected from the group consisting of 1,2,4-triazole, 3-methyl-1,2,4-triazole, 3,5-dimethyl-1,2,4-triazole, 1-amino-1,2,4-triazole, 3-amino-1,2,4-triazole, 5-amino-3-methyl-1,2,4-triazole, and 3-isopropyl-1,2,4-triazole.
Claim 4
Dependent Claim
30 words
Method according to claim 1 wherein the azoles are of the general formula (II) and are selected from the group consisting of 1,2,3-triazole, 1-methyl-1,2,3-triazole, 1-amino-1,2,3-triazole, 1-amino-5-methyl-1,2,3-triazole, 4,5-dimethyl-1,2,3-triazole, 1-amino-5(n)propyl-1,2,3-triazole, and 1-(β-amino-ethyl)-1,2,3-triazole.
Claim 5
Dependent Claim
31 words
Method according to claim 1 wherein the azoles are of the general formula (III) or (IV) and are selected from the group consisting of tetrazole, 1-methyltetrazole, 2-methyl-tetrazole, 5-amino-1H-tetrazole, 5-amino-1-methyltetrazole, and 1-(β-amino-ethyl)-tetrazole.
Claim 6
Dependent Claim
37 words
Method according to claim 1 wherein said solution contains 50 to 200 g./l. of hydrogen peroxide, 10 to 150 g./l. of sulfuric or nitric acid, and 0.01 to 10 g./l. of one or more of said azoles.
Claim 7
Dependent Claim
16 words
Method according to claim 1 wherein said solution contains a stabilizer and a surface active agent.
Claim 8
Dependent Claim
22 words
Method according to claim 1 wherein the copper or copper alloy is so contacted at a temperature ranging from 20° to 50°C.
Claim 9
Dependent Claim
18 words
Method according to claim 1 wherein said solution contains a glycol ether stabilizer and a surface active agent.
Claim 10
Dependent Claim
17 words
Method according to claim 1 wherein said solution contains an alcohol stabilizer and a surface active agent.
References Cited (Backward Citations)
US2849297A
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US3293093A
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US3412032A
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US3809588A
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US3773577A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-04-06 | 1979-10-06 | 1980-04-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-04-06 | 1983-10-06 | 1984-04-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-04-06 | 1987-10-06 | 1988-04-06 | $7700.00 | Window Closed / Lapsed |