US3773577A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Composition for etching copper with reduced sideways-etching
Assignee: Nippon Peroxide Co Ltd
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Filing: 1972-04-11
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Granted: 1973-11-20
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Expires: 1992-04-11
Abstract
Abstract An etching bath composition which reduces the extent of side or lateral etching is prepared by admixing an additive selected from a group consisting of aliphatic amines having a straight chain of more than four carbon atoms, cyclohexylamine, benzotriazole or N, N-dialkylaniline, with a basic composition of sulfuric acid and hydrogen peroxide.
Inventors
- 👤 Y Shibasaki
- 👤 K Oyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 16:20
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/16; C23F1/18
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
23 words
The composition of claim 1, wherein the concentration of hydrogen peroxide is 2-30% w/v and the concentration of the additive is 0.01-5% w/v.
Claim 2
Dependent Claim
67 words
In a process for selective etching of copper or an alloy containing copper, wherein the surface of said copper or alloy thereof is selectively coated with a resist material, the improvement comprising using an etching solution comprising a basic composition of sulfuric acid and hydrogen peroxide and an additive selected from the group consisting of an aliphatic amine containing at least four carbon atoms, benzotriazole and N,N-dialkylaniline.
Claim 3
Dependent Claim
32 words
The process of claim 3, wherein the concentration of sulfuric acid is 3-30% w/v and the concentration of hydrogen peroxide is 2-30% w/v and the concentration of the additive is 0.01-5% w/v.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-11-19 | 1977-05-21 | 1977-11-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-11-19 | 1981-05-21 | 1981-11-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-11-19 | 1985-05-21 | 1985-11-20 | $7700.00 | Window Closed / Lapsed |