US4075367A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor processing of silicon nitride
Assignee: LSI Logic FSI Corp
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Filing: 1976-03-18
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Granted: 1978-02-21
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Expires: 1996-03-18
Abstract
Abstract A method of providing improved adherence of photoresist to a silicon nitride layer on a semiconductor wafer by first preparing a heated solution of trichlorophenylsilane, immersing the nitride coated wafer in the trichlorophenylsilane solution, drying and baking the wafer prior to the application of the photoresist.
Inventors
- 👤 Michael R. Gulett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:41
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/694; H10P14/6943; H10P14/69433; H10P14/65; H10P14/6502; H10P14/6506; H10P14/6516; H10P14/6529; H10P14/6534; H10P95/00; Y; Y10; Y10S; Y10S430/00; Y10S430/136; Y10S438/00; Y10S438/974
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
166 words
A method of preparing a silicon nitride surface on a semiconductor device for improving the adhesion of photoresist material to withstand a hydrofluoric acid etchant, comprising the steps of: a. preparing a treatment bath consisting essentially of xylene, trichlorethylene, and trichlorophenylsilane in a ratio of 20:20:1 respectively by volume having a temperature of from 70° C to 76° C; b. immersing said surface in said bath for about 10 minutes; c. removing said surface from said bath and washing it in a trichlorethylene bath at room temperature; d. subjecting said surface to ultrasonic cleaning while in said trichlorethylene bath; e. removing said surface from said trichlorethylene bath and washing it in a xylene bath at room temperature; f. subjecting said surface to ultrasonic cleaning while in said xylene bath; g. removing said surface from said xylene bath and spin drying it in a nitrogen atmosphere at room temperature; and h. baking said surface for about 45 minutes at a temperature of 140° C to 160° C.
Claim 2
Independent Claim
166 words
A method of preparing a silicon nitride surface on a semiconductor device for improving the adhesion of photoresist material to withstand a hydrofluoric acid etchant, comprising the steps of: a. preparing a treatment bath consisting essentially of xylene, trichlorethylene, and trichlorophenylsilane in a ratio of 20:20:1 respectively by volume having a temperature of from 70° C to 76° C; b. immersing said surface in said bath for about 10 minutes; c. removing said surface from said bath and washing it in a trichlorethylene bath at room temperature; d. subjecting said surface to ultrasonic cleaning while in said trichlorethylene bath; e. removing said surface from said trichlorethylene bath and washing it in a xylene bath at room temperature; f. subjecting said surface to ultrasonic cleaning while in said xylene bath; g. removing said surface from said xylene bath and spin drying it in a nitrogen atmosphere at room temperature; and h. baking said surface for about 45 minutes at a temperature of 140° C to 160° C.
Claim 3
Dependent Claim
53 words
The method of claim 1 wherein said treatment bath is prepared by mixing one part by volume of xylene with one part by volume of trichlorethylene, heating the mixture from about 70° C to 76° C, and adding one part by volume of trichlorophenylsilane to 40 parts by volume of the xylene-trichlorethylene mixture.
Claim 4
Dependent Claim
39 words
The method of claim 1 wherein said surface is washed in said trichlorethylene and xylene baths for approximately 30 seconds each and wherein said surface is ultrasonically cleaned in said trichlorethylene and xylene baths for about 5 minutes each.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein said surface is spin dryed for a period of from 2 to 3 minutes.
References Cited (Backward Citations)
US3482977A
Cited
US3549368A
Cited
US3706612A
Cited
US3586554A
Cited
US3758306A
Cited
US3898351A
Cited
US3911169A
Cited
US3867218A
Cited
US3962004A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-02-20 | 1981-08-22 | 1982-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-02-20 | 1985-08-22 | 1986-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-02-20 | 1989-08-22 | 1990-02-21 | $7700.00 | Window Closed / Lapsed |