Abstract A sputtering apparatus of the bell-jar type includes a high-vacuum pump disposed centrally of, and directly within a vacuum chamber of the apparatus. A separate enclosing member is disposed within the chamber and allows selective exposure of the pump to the chamber. An annular workholder is mounted in concentric surrounding relation with the pump, and an apertured, annular shutter is mounted in concentric surrounding relation with the workholder. Targets of materials to be sputter deposited on the workpieces are mounted on the inside wall of the main enclosure of the apparatus. The shutter and the workholder are moved in synchronism at the beginning and at the end of the deposition cycle to provide a uniform exposure of all the workpieces to the targets.
A vacuum treating apparatus comprising: a treatment chamber; a first pump disposed outside the chamber in communication therewith; a second pump disposed centrally within said chamber; means for selectively isolating said second pump from a portion of said chamber; a work assembly, within said portion of the chamber, disposed in concentric surrounding relation with said second pump; and a treating means, within said portion of the chamber, disposed radially outwardly of said work assembly.
Claim 2
Dependent Claim
74 words
A vacuum treating apparatus comprising: a treatment chamber; a first pump disposed outside the chamber in communication therewith; a second pump disposed centrally within said chamber; means for selectively isolating said second pump from a portion of said chamber; a work assembly, within said portion of the chamber, disposed in concentric surrounding relation with said second pump; and a treating means, within said portion of the chamber, disposed radially outwardly of said work assembly.
Claim 3
Dependent Claim
43 words
An apparatus as in claim 1 in which said isolating means comprises a cap member shaped to fit over said second pump in sealed relation with a wall of said chamber; and means for selectively moving said cap member into said sealed relation.
Claim 4
Dependent Claim
28 words
An apparatus as in claim 2 wherein said cap member is movable a distance sufficient to substantially fully expose said second pump to said portion of said chamber.