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US4035722A Expired / Lapsed US ⏱️ 0.0 years remaining

Multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits

Assignee: Individual
•
Filing: 1975-03-17
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Granted: 1977-07-12
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Expires: 1995-03-17
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Abstract

Abstract The proposed multiprobe head comprises a probe holder which is a monolithic glass block having longitudinal capillary channels, said member being secured in a casing with its butt end facing contact elements of a semiconductor instrument or microcircuit being checked. Said capillary channels receive probes which are adapted for axial movement.

Inventors

  • 👤 Anatoly Leonidovich Ryabov
  • 👤 Viktor Egorovich Lukyanchikov
  • 👤 Alexei Pavlovich Khutarev

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 17:08
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07314

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 156 words
A multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits having contact elements, comprising: a casing; a probe holder constructed as a monolithic glass block secured in said casing with its butt end facing the contact elements; a group of longitudinal capillary channels in said probe holder, the distances therebetween corresponding to the distances between said contact elements; a group of probes disposed in said capillary channels and adapted for axial movement, said probes coming into contact with said contact elements in the course of checking electrical parameters of semiconductor instruments and microcircuits; a lead connected to each probe; an end face of said probe holder directed towards the inside of said casing; each lead having a loop arranged above said end face of said probe holder for developing a force for keeping said probe in contact with said contact element, said capillary channels having a length sufficient for providing guidance to said probes.
Claim 2
Dependent Claim 156 words
A multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits having contact elements, comprising: a casing; a probe holder constructed as a monolithic glass block secured in said casing with its butt end facing the contact elements; a group of longitudinal capillary channels in said probe holder, the distances therebetween corresponding to the distances between said contact elements; a group of probes disposed in said capillary channels and adapted for axial movement, said probes coming into contact with said contact elements in the course of checking electrical parameters of semiconductor instruments and microcircuits; a lead connected to each probe; an end face of said probe holder directed towards the inside of said casing; each lead having a loop arranged above said end face of said probe holder for developing a force for keeping said probe in contact with said contact element, said capillary channels having a length sufficient for providing guidance to said probes.
Claim 3
Dependent Claim 22 words
A head as claimed in claim 1 wherein the casing has an end face having radially arranged slots for receiving said leads.
Claim 4
Dependent Claim 37 words
A head as claimed in claim 1, including a bushing inside said casing and above said end face of the probe holder, said bushing having radially arranged slots for receiving a loop associated with a respective probe.
Claim 5
Dependent Claim 108 words
A multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits having contact elements, comprising: a casing; a probe holder constructed as a monolithic glass block secured in said casing with its butt end facing the contact elements; a group of longitudinal capillary channels in said probe holder, the distances therebetween corresponding to the distances between said contact elements; a group of probes disposed in said capillary channels and adapted for axial movement, said probes coming into contact with said contact elements in the course of checking electrical parameters of semiconductor instruments and microcircuits; a lead connected to each probe, said capillary channels having a triangular cross-section.
Claim 6
Dependent Claim 108 words
A multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits having contact elements, comprising: a casing; a probe holder constructed as a monolithic glass block secured in said casing with its butt end facing the contact elements; a group of longitudinal capillary channels in said probe holder, the distances therebetween corresponding to the distances between said contact elements; a group of probes disposed in said capillary channels and adapted for axial movement, said probes coming into contact with said contact elements in the course of checking electrical parameters of semiconductor instruments and microcircuits; a lead connected to each probe, said capillary channels having a triangular cross-section.
Claim 7
Dependent Claim 188 words
A multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits having contact elements, comprising: a casing; a probe holder constructed as a monolithic glass block secured in said casing with its butt end facing the contact elements; a group of longitudinal capillary channels in said probe holder, the distances therebetween corresponding to the distances between said contact elements; a group of probes disposed in said capillary channels and adapted for axial movement, said probes coming into contact with said contact elements in the course of checking electrical parameters of semiconductor instruments and microcircuits; a lead connected to each probe; an end face of said probe holder directed towards the inside of said casing; each lead having a loop arranged above said end face of said probe holder for developing a force for keeping said probe in contact with said contact element, said capillary channels having a triangular cross-section; said casing having an end face having radially arranged slots for receiving said leads; a bushing inside said casing and above said end face of the probe holder, said bushing having radially arranged slots for receiving said loops.
Claim 8
Dependent Claim 188 words
A multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits having contact elements, comprising: a casing; a probe holder constructed as a monolithic glass block secured in said casing with its butt end facing the contact elements; a group of longitudinal capillary channels in said probe holder, the distances therebetween corresponding to the distances between said contact elements; a group of probes disposed in said capillary channels and adapted for axial movement, said probes coming into contact with said contact elements in the course of checking electrical parameters of semiconductor instruments and microcircuits; a lead connected to each probe; an end face of said probe holder directed towards the inside of said casing; each lead having a loop arranged above said end face of said probe holder for developing a force for keeping said probe in contact with said contact element, said capillary channels having a triangular cross-section; said casing having an end face having radially arranged slots for receiving said leads; a bushing inside said casing and above said end face of the probe holder, said bushing having radially arranged slots for receiving said loops.

References Cited (Backward Citations)

US3731191A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-07-11 1981-01-10 1981-07-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-07-11 1985-01-10 1985-07-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-07-11 1989-01-10 1989-07-12 $7700.00 Window Closed / Lapsed

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