US4034130A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of growing pyrolytic silicon dioxide layers
Assignee: International Business Machines Corp
•
Filing: 1975-09-22
•
Granted: 1977-07-05
•
Expires: 1995-09-22
Abstract
Abstract The method of producing pyrolytic SiO2 on the surface of a substrate comprises mixing SiH4 and NOCl in an atmosphere of carrier gas, and passing the gas mixture over the heated substrate. With this process, precipitation of SiO2 on the walls of the reaction chamber is avoided.
Inventors
- 👤 Marian Briska
- 👤 Ewald Eisenbraun
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 06:59
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
64 words
A method of growing pyrolytic silicon dioxide layers on a heated substrate wherein the resulting charge carrier numbers per cm 2 is less than about 10 12 comprising mixing nitrosyl chloride and silane in a volume ratio between approximately 4:1 and approximately 50:1 in the presence of a carrier gas, and passing the gaseous mixture over said substrate while maintaining a predetermined substrate temperature.
Claim 2
Independent Claim
64 words
A method of growing pyrolytic silicon dioxide layers on a heated substrate wherein the resulting charge carrier numbers per cm 2 is less than about 10 12 comprising mixing nitrosyl chloride and silane in a volume ratio between approximately 4:1 and approximately 50:1 in the presence of a carrier gas, and passing the gaseous mixture over said substrate while maintaining a predetermined substrate temperature.
Claim 3
Dependent Claim
22 words
A method as claimed in claim 1 wherein the nitrosyl chloride and silane are mixed in a volume ratio of approximately 13:1.
Claim 4
Dependent Claim
22 words
A method as claimed in claim 1 wherein the method takes place at predetermined substrate temperatures between about 780° and 1000° C.
Claim 5
Dependent Claim
20 words
A method as claimed in claim 3 wherein the method takes place at substrate temperatures of less than 900° C.
Claim 6
Dependent Claim
15 words
A method as claimed in claim 1 wherein the carrier gas is an inert gas.
Claim 7
Dependent Claim
13 words
A method as claimed in claim 5 wherein the carrier gas is nitrogen.
Claim 8
Dependent Claim
63 words
A method as claimed in claim 1 wherein the pyrolization takes place at a substrate temperature of 880° C. in a gas flow consisting of about 30 liters nitrogen per minute, 0.5 liters argon containing 5 volume-% silane per minute, and 0.15 liters nitrosyl chloride per minute, and flowing through a reaction tube with a flow cross-section of about 40 cm 2 .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-07-04 | 1981-01-03 | 1981-07-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-07-04 | 1985-01-03 | 1985-07-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-07-04 | 1989-01-03 | 1989-07-05 | $7700.00 | Window Closed / Lapsed |