US4033790A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Solid diffusion dopants for semiconductors and method of making the same
Assignee: Denka Co Ltd
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Filing: 1976-07-29
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Granted: 1977-07-05
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Expires: 1996-07-29
Abstract
Abstract Disclosed is a solid diffusion source for the phosphorus doping of semiconductors, which comprises a substance composed of at least one kind of compound R2O3 selected from the group consisting of Y2O3, La2O3 and Ce2O3 and P2O5 and containing mainly a compound with a chemical formula R2O3.5P2O5.
Inventors
- 👤 Koreaki Gunjigake
- 👤 Masashi Hasegawa
- 👤 Hiroshi Oizumi
- 👤 Yoshio Ogata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:37
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/19; C; C30; C30B; C30B31/00; C30B31/06; C30B31/08; C30B31/16; C30B31/165; Y; Y10; Y10S; Y10S252/00; Y10S252/95; Y10S252/951
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
65 words
A solid phosphorus dopant source for semiconductors, comprising a substance composed of at least one kind of compound R 2 O 3 selected from the group consisting of Y 2 O 3 , La 2 O 3 and Ce 2 O 3 P 2 O 5 and containing mainly a compound with a chemical formula R 2 O 3 . 5P 2 O 5 .
Claim 2
Dependent Claim
65 words
A solid phosphorus dopant source for semiconductors, comprising a substance composed of at least one kind of compound R 2 O 3 selected from the group consisting of Y 2 O 3 , La 2 O 3 and Ce 2 O 3 P 2 O 5 and containing mainly a compound with a chemical formula R 2 O 3 . 5P 2 O 5 .
Claim 3
Dependent Claim
24 words
The solid phosphorus dopant source according to claim 1, wherein said compound R 2 O 3 is a compound Y 2 O 3 .
Claim 4
Dependent Claim
24 words
The solid phosphorus dopant source according to claim 1, wherein said compound R 2 O 3 is a compound La 2 O 3 .
Claim 5
Dependent Claim
24 words
The solid phosphorus dopant source according to claim 1, wherein said compound R 2 O 3 is a compound Ce 2 O 3 .
Claim 6
Dependent Claim
38 words
The solid phosphorus dopant source according to claim 1, wherein said substance contains the compound R 2 O 3 . 5P 2 O 5 and less than 20 wt% of an inorganic compound with respect to the former.
Claim 7
Dependent Claim
16 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound is silica fiber.
Claim 8
Dependent Claim
20 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound having a diameter of less than 50μ.
Claim 9
Dependent Claim
16 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound is silica-alumina fiber.
Claim 10
Dependent Claim
23 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound is silica-alumina fiber having a diameter of less than 50μ.
Claim 11
Dependent Claim
22 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound is composed of silica fiber and SiO 2 .
Claim 12
Dependent Claim
24 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound is composed of silica fiber and Al 2 O 3 .
Claim 13
Dependent Claim
22 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound is composed of silica-alumina fiber and SiO 2 .
Claim 14
Dependent Claim
24 words
The solid phosphorus dopant source according to claim 5, wherein said inorganic compound is composed of silica-alumina fiber and Al 2 O 3 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-07-04 | 1981-01-03 | 1981-07-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-07-04 | 1985-01-03 | 1985-07-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-07-04 | 1989-01-03 | 1989-07-05 | $7700.00 | Window Closed / Lapsed |