Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
174 words
A monitoring system for determining channel widths comprising, a semiconductor substrate having a first conductivity region and first and second parallel strips of a second conductivity disposed at one surface thereof within said first conductivity region, a first conductive strip having a nominal width and a second conductive strip having a nominal width arranged parallel to each other and extending between said first and second parallel strips for forming first and second conductive channels, respectively, in said first conductivity region, a thin dielectric medium interposed between said conductive strips and said substrate, means for selectively applying a first voltage between said first conductive strip and said first parallel strip and for selectively applying a second voltage between said second conductive strip and said first parallel strip, and means for measuring current flow in said second parallel strip upon application of said first voltage and upon application of said second voltage to determine in relationship with the nominal width of at least one of said conductive strips the widths of said first and second channels.
Claim 2
Dependent Claim
174 words
A monitoring system for determining channel widths comprising, a semiconductor substrate having a first conductivity region and first and second parallel strips of a second conductivity disposed at one surface thereof within said first conductivity region, a first conductive strip having a nominal width and a second conductive strip having a nominal width arranged parallel to each other and extending between said first and second parallel strips for forming first and second conductive channels, respectively, in said first conductivity region, a thin dielectric medium interposed between said conductive strips and said substrate, means for selectively applying a first voltage between said first conductive strip and said first parallel strip and for selectively applying a second voltage between said second conductive strip and said first parallel strip, and means for measuring current flow in said second parallel strip upon application of said first voltage and upon application of said second voltage to determine in relationship with the nominal width of at least one of said conductive strips the widths of said first and second channels.
Claim 3
Dependent Claim
26 words
A monitoring system as set forth in claim 1 wherein said current flow measuring means includes a source of voltage applied to said second parallel strip.
Claim 4
Dependent Claim
47 words
A monitoring system as set forth in claim 2 wherein said current flow measuring means and said voltage applying means provide voltage and current values used in a relationship for providing a ratio between the widths of said first and second channels which is a constant K.
Claim 5
Dependent Claim
41 words
A monitoring system as set forth in claim 3 wherein the width of one of said channels is determined by a relationship which is equal to 2 times the design width of one of the channels divided by the constant (K+1).
Claim 6
Dependent Claim
49 words
A monitoring system as set forth in claim 3 wherein the width of one of said channels is determined by a relationship which is equal to the design width of one of the channels minus the design width of the other of said channels divided by the constant (K-1).
Claim 7
Dependent Claim
82 words
A monitoring system as set forth in claim 3 wherein the constant K is derived in accordance with the relationship ##EQU4## where I1s is the current flow in the first parallel strip produced by said first voltage and I2s is the current flow in the first strip produced by said second voltage, V1gs and V2gs are said first and second voltages, respectively, and Vt1 and Vt2 are the threshold voltages at which current begins to pass through said first and second channels.
Claim 8
Dependent Claim
19 words
A monitoring system as set forth in claim 6 wherein said first and second channels have different design widths.
Claim 9
Dependent Claim
20 words
A monitoring system as set forth in claim 6 wherein said first and second channels have the same design width.
Claim 10
Dependent Claim
40 words
A monitoring system as set forth in claim 6 wherein an edge of each of said first and second parallel strips and an edge of each of said first and second conductive strips define said first and second conductive channels.
Claim 11
Dependent Claim
70 words
A monitoring system as set forth in claim 6 further including a conductive layer interposed between said thin dielectric medium and said first and second conductive strips, said conductive layer having first and second openings therein disposed between said first and second parallel strips, an edge of each of said openings and an edge of each of said first and second conductive strips define said first and second conductive channels.