US3287637A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High frequency current means including capacitive probe members for determining the electrical resistance of a semiconductor layer
Assignee: Siemens Schuckertwerke AG
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Filing: 1963-07-10
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Granted: 1966-11-22
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Expires: 1983-07-10
Abstract
No abstract record available.
Inventors
- 👤 Keller Wolfgang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 13:15
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/2607; G01R31/2637; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/041
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
95 words
DEVICE FOR DETERMINING THE RESISTANCE OF THIN SEMICONDUCTOR LAYERS, SAID DEVICE COMPRISING A SEMICONDUCTOR SPECIMEN, TWO ELECTRODES HAVING RESPECTIVE PLANAR AND PARALLEL SURFACES SPACED FROM EACH OTHER A DISTANCE LARGER THAN THE THICKNESS OF SAID SEMICONDUCTOR SPECIMEN, SAID SPECIMEN BEING INSERTED BETWEEN THE ELECTRODE SURFACES IN SPACED RELATION THERETO, SAID TWO ELECTRODES HAVING RESPECSTIVE OPENINGS OPPOSITE EACH OTHER, TWO CAPACITIVE PROBE MEMBER LOCATED IN SAID RESPECTIVE OPENINGS AND INSULATED FROM SAID ELECTRODES, SAID PROBE MEMBERS BEING SPACED FROM EACH OTHER A DISTANCE LARGER THAN SAID THICKNESS SO AS TO ALSO REMAIN OUT OF CONTACT WITH
Claim 2
Dependent Claim
95 words
DEVICE FOR DETERMINING THE RESISTANCE OF THIN SEMICONDUCTOR LAYERS, SAID DEVICE COMPRISING A SEMICONDUCTOR SPECIMEN, TWO ELECTRODES HAVING RESPECTIVE PLANAR AND PARALLEL SURFACES SPACED FROM EACH OTHER A DISTANCE LARGER THAN THE THICKNESS OF SAID SEMICONDUCTOR SPECIMEN, SAID SPECIMEN BEING INSERTED BETWEEN THE ELECTRODE SURFACES IN SPACED RELATION THERETO, SAID TWO ELECTRODES HAVING RESPECSTIVE OPENINGS OPPOSITE EACH OTHER, TWO CAPACITIVE PROBE MEMBER LOCATED IN SAID RESPECTIVE OPENINGS AND INSULATED FROM SAID ELECTRODES, SAID PROBE MEMBERS BEING SPACED FROM EACH OTHER A DISTANCE LARGER THAN SAID THICKNESS SO AS TO ALSO REMAIN OUT OF CONTACT WITH
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-11-21 | 1970-05-23 | 1970-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-11-21 | 1974-05-23 | 1974-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-11-21 | 1978-05-23 | 1978-11-22 | $7700.00 | Window Closed / Lapsed |