Fixture and system for handling plate like objects

Claim 1

An apparatus for handling plate like objects, which comprises: 1. a gas actuated fixture having a surface for releasably picking up the plate like objects utilizing the Bernouilli effect, 2. means for moving said pickup fixture in a plane of motion from a first to a second position,

Claim 2

An apparatus for handling plate like objects, which comprises: 1. a gas actuated fixture having a surface for releasably picking up the plate like objects utilizing the Bernouilli effect, 2. means for moving said pickup fixture in a plane of motion from a first to a second position,

Claim 9

An apparatus for handling plate like objects, which comprises: 1. a gas actuated device having a surface for releasably picking up the plate like objects, 2. means for moving said pickup device from a first to a second position, and 3. a plurality of retractable members extending from the pickup surface of the device and surrounding an area of the pickup surface of the device, the area being dimensioned to receive one of the plate like objects, said retractable members serving to confine a plate like object picked up with said apparatus to the area so enclosed, said retractable members retracting in response to force applied to them orthogonally to said pickup surface, thereby preventing damage to a plate-like object or a support for a plate-like object applying such a force to said retractable members.

Claim 10

An apparatus for handling plate like objects, which comprises: 1. a gas actuated device having a surface for releasably picking up the plate like objects, 2. means for moving said pickup device from a first to a second position, and 3. a plurality of retractable members extending from the pickup surface of the device and surrounding an area of the pickup surface of the device, the area being dimensioned to receive one of the plate like objects, said retractable members serving to confine a plate like object picked up with said apparatus to the area so enclosed, said retractable members retracting in response to force applied to them orthogonally to said pickup surface, thereby preventing damage to a plate-like object or a support for a plate-like object applying such a force to said retractable members.

Claim 15

A system for handling plate like objects which comprises: 1. an apparatus for handling plate like objects comprising: a. a Bernoulli fixture having a surface for picking up the plate like objects, b. means for moving said Bernoulli fixture in a plane of motion from a first to a second position, c. pneumatically operated means forming a part of said Bernoulli fixture for moving the pickup surface orthogonally to the plane of motion, and d. stop means for limiting the movement of the pick up surface to a predetermined distance from the plane of motion, 2. an air track conveyer for the plate like objects, said conveyer including means for restraining the objects beneath the first position, and 3. means for positioning successive locations of a carrier for the plate like objects beneath the second position.

Claim 16

A system for handling plate like objects which comprises: 1. an apparatus for handling plate like objects comprising: a. a Bernoulli fixture having a surface for picking up the plate like objects, b. means for moving said Bernoulli fixture in a plane of motion from a first to a second position, c. pneumatically operated means forming a part of said Bernoulli fixture for moving the pickup surface orthogonally to the plane of motion, and d. stop means for limiting the movement of the pick up surface to a predetermined distance from the plane of motion, 2. an air track conveyer for the plate like objects, said conveyer including means for restraining the objects beneath the first position, and 3. means for positioning successive locations of a carrier for the plate like objects beneath the second position.

Claim 19

A system for handling semiconductor wafers, which comprises: 1. a fixture for picking up semiconductor wafers, which comprises: a. upper and lower members, said lower member having a lower flat surface; b. a bellows joining said upper and lower members, said bellows, upper and lower members forming a fluid tight enclosure; c. means communicating with the enclosure for selectively supplying a fluid under pressure to the enclosure; and d. means, extending through said lower member, for supplying a sufficient gas flow to the lower flat surface of said lower member, so that said fixture will pick up one of the semiconductor wafers positioned proximate to the lower surface of said lower member when the gas flows around the semiconductor wafer, 2. an air slide conveyer for the semiconductor wafers, 3. means on said air slide conveyer for stopping one of the semiconductor wafers at a first location, 4. means to one side of said air slide conveyer for successively positioning wafer receiving locations of a flat member at a second location; and 5. means for moving said fixture between a position over the first location and a position over the second location.

Claim 20

A system for handling semiconductor wafers, which comprises: 1. a fixture for picking up semiconductor wafers, which comprises: a. upper and lower members, said lower member having a lower flat surface; b. a bellows joining said upper and lower members, said bellows, upper and lower members forming a fluid tight enclosure; c. means communicating with the enclosure for selectively supplying a fluid under pressure to the enclosure; and d. means, extending through said lower member, for supplying a sufficient gas flow to the lower flat surface of said lower member, so that said fixture will pick up one of the semiconductor wafers positioned proximate to the lower surface of said lower member when the gas flows around the semiconductor wafer, 2. an air slide conveyer for the semiconductor wafers, 3. means on said air slide conveyer for stopping one of the semiconductor wafers at a first location, 4. means to one side of said air slide conveyer for successively positioning wafer receiving locations of a flat member at a second location; and 5. means for moving said fixture between a position over the first location and a position over the second location.