US3438668A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Contactless lifter
Assignee: General Electric Co
•
Filing: 1965-08-26
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Granted: 1969-04-15
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Expires: 1985-08-26
Abstract
No abstract record available.
Inventors
- 👤 Raymond G Olsson
- 👤 Earl C Williams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 05:44
CPC Classifications
B; B66; B66C; B66C1/00; B66C1/02; B66C1/0256; B66C1/0268; B66C1/0212; B66C1/0231; B66C1/0293
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
134 words
A WAFER PICK-UP DEVICE COMPRISING A PICK-UP HEAD HAVING A FLOW BOUNDARY SURFACE, AN OPENING IN SAID SURFACE, A DUCT FOR CONVEYING AIR CONNECTED TO SAID OPENING, VALVE MEANS FOR CONTROLLING THE FLOW OF AIR IN SAID DUCT, MEANS FOR DIRECTING THE AIR FLOWING THROUGH SAID OPENING BETWEEN SAID SUURFACE AND THE WAFER TO BE PICKED UP TO PRODUCE A LOW PRESSURE REGION BETWEEN SAID SURFACE AND THE WAFER, THE FLOWING AIR IN SAID LOW PRESSURE REGION SERVING AS A BUFFER PREVENTING CONTACT BETWEEN THE WAFER AND SAID SURFACE, AND PROJECTIONS FORMED ON THE PERIMETER OF SAID SURFACE, SAID PROJECTIONS EXTENDING PERPENDICULAR TO THE DIRECTION OF AIR FLOW IN SAID LOW PRESSURE REGION AND ENGAGEABLE WITH THE EDGE OF THE WAFER TO PREVENT SAID WAFER FROM MOVING IN A DIRECTION PARALLEL TO SAID SURFACE.
Claim 2
Dependent Claim
134 words
A WAFER PICK-UP DEVICE COMPRISING A PICK-UP HEAD HAVING A FLOW BOUNDARY SURFACE, AN OPENING IN SAID SURFACE, A DUCT FOR CONVEYING AIR CONNECTED TO SAID OPENING, VALVE MEANS FOR CONTROLLING THE FLOW OF AIR IN SAID DUCT, MEANS FOR DIRECTING THE AIR FLOWING THROUGH SAID OPENING BETWEEN SAID SUURFACE AND THE WAFER TO BE PICKED UP TO PRODUCE A LOW PRESSURE REGION BETWEEN SAID SURFACE AND THE WAFER, THE FLOWING AIR IN SAID LOW PRESSURE REGION SERVING AS A BUFFER PREVENTING CONTACT BETWEEN THE WAFER AND SAID SURFACE, AND PROJECTIONS FORMED ON THE PERIMETER OF SAID SURFACE, SAID PROJECTIONS EXTENDING PERPENDICULAR TO THE DIRECTION OF AIR FLOW IN SAID LOW PRESSURE REGION AND ENGAGEABLE WITH THE EDGE OF THE WAFER TO PREVENT SAID WAFER FROM MOVING IN A DIRECTION PARALLEL TO SAID SURFACE.
References Cited (Backward Citations)
US2999499A
Cited
GB944175A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-04-14 | 1972-10-14 | 1973-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-04-14 | 1976-10-14 | 1977-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-04-14 | 1980-10-14 | 1981-04-15 | $7700.00 | Window Closed / Lapsed |