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US3963839A
Expired / Lapsed
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Method for the preparation of thin layers of tungsten and molybdenum
Assignee: Siemens AG
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Filing: 1974-08-29
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Granted: 1976-06-15
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Expires: 1994-08-29
Abstract
Abstract Preparation of thin layers of tungsten or molybdenum on a highly temperature-resistant layer substrate by thermal evaporation in a high vacuum, where WO 3 or MoO 3 , respectively, is evaporated and the layer substrate is heated so that the oxides are decomposed and a pure tungsten or molybdenum layer is deposited on the layer substrate.
Inventors
- 👤 Helmut Freller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 06:08
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
132 words
Method for the preparation of thin layers of a heavy metals selected from the group consisting of tungsten and molybdenum on a highly temperature-resistant substrate comprising: a. heating a heavy metal oxide selected from the group consisting of tungsten VI oxide and molybdenum VI oxide under high vacuum to form an evaporated metal oxide; b. contacting said evaporated metal oxide with a temperature-resistant substrate heated at a temperature sufficient to decompose said evaporated metal oxide whereby said metal oxide is decomposed at the vicinity of or at the surface of said substrate into a solid heavy metal phase and a gaseous oxygen phase, said heavy metal phase being deposited as a thin layer on said substrate; and c. removing said gaseous oxygen phase from said evaporated metal oxide as it is formed.
Claim 2
Dependent Claim
132 words
Method for the preparation of thin layers of a heavy metals selected from the group consisting of tungsten and molybdenum on a highly temperature-resistant substrate comprising: a. heating a heavy metal oxide selected from the group consisting of tungsten VI oxide and molybdenum VI oxide under high vacuum to form an evaporated metal oxide; b. contacting said evaporated metal oxide with a temperature-resistant substrate heated at a temperature sufficient to decompose said evaporated metal oxide whereby said metal oxide is decomposed at the vicinity of or at the surface of said substrate into a solid heavy metal phase and a gaseous oxygen phase, said heavy metal phase being deposited as a thin layer on said substrate; and c. removing said gaseous oxygen phase from said evaporated metal oxide as it is formed.
Claim 3
Dependent Claim
16 words
The method of claim 1, which further comprises rotating said layer substrate about a vertical axis.
Claim 4
Dependent Claim
17 words
The method of claim 1, which further comprises rotating said layer substrate about two mutually inclined axes.
Claim 5
Dependent Claim
113 words
Method for the preparation of thin layers of tungsten on a highly temperature-resistant substrate comprising: a. heating tungsten (VI) oxide at a temperature of 1250° C. at 10.sup. -5 Torr to form an evaporated tungsten oxide; b. contacting said evaporated tungsten oxide with a temperature-resistant substrate heated to a temperature of at least 1500° C. whereby said evaporated tungsten oxide is decomposed at the vicinity of or at the surface of said substrate into a solid tungsten metal phase and a gaseous oxygen phase, said tungsten metal phase being deposited as a thin layer on said substrate; and c. removing said gaseous oxygen phase from said evaporated tungsten oxide as it is formed.
Claim 6
Dependent Claim
113 words
Method for the preparation of thin layers of tungsten on a highly temperature-resistant substrate comprising: a. heating tungsten (VI) oxide at a temperature of 1250° C. at 10.sup. -5 Torr to form an evaporated tungsten oxide; b. contacting said evaporated tungsten oxide with a temperature-resistant substrate heated to a temperature of at least 1500° C. whereby said evaporated tungsten oxide is decomposed at the vicinity of or at the surface of said substrate into a solid tungsten metal phase and a gaseous oxygen phase, said tungsten metal phase being deposited as a thin layer on said substrate; and c. removing said gaseous oxygen phase from said evaporated tungsten oxide as it is formed.
Claim 7
Dependent Claim
112 words
Method for the preparation of thin layers of molybdenum on a highly temperature-resistant substrate comprising: a. heating a molybdenum VI oxide at 750° C. and 10.sup. -5 Torr to form an evaporated molybdenum oxide; b. contacting said evaporated molybdenum oxide with a temperature-resistant layer substrate heated to a temperature of at least 900° C. whereby said evaporated molybdenum oxide is decomposed at the vicinity of or at the surface of said substrate into a solid molybdenum metal phase and a gaseous oxygen phase, said molybdenum metal phase being deposited as a thin layer on said substrate; and c. removing said gaseous oxygen phase from said evaporated metal oxide as it is formed.
Claim 8
Dependent Claim
112 words
Method for the preparation of thin layers of molybdenum on a highly temperature-resistant substrate comprising: a. heating a molybdenum VI oxide at 750° C. and 10.sup. -5 Torr to form an evaporated molybdenum oxide; b. contacting said evaporated molybdenum oxide with a temperature-resistant layer substrate heated to a temperature of at least 900° C. whereby said evaporated molybdenum oxide is decomposed at the vicinity of or at the surface of said substrate into a solid molybdenum metal phase and a gaseous oxygen phase, said molybdenum metal phase being deposited as a thin layer on said substrate; and c. removing said gaseous oxygen phase from said evaporated metal oxide as it is formed.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-06-15 | 1979-12-15 | 1980-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-06-15 | 1983-12-15 | 1984-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-06-15 | 1987-12-15 | 1988-06-15 | $7700.00 | Window Closed / Lapsed |