Patent US3909610A successfully refreshed from Google Patents.
US3909610A
Expired / Lapsed
US
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Apparatus for displaying the energy distribution of a charged particle beam
Assignee: Jeol Ltd
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Filing: 1974-08-08
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Granted: 1975-09-30
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Expires: 1994-08-08
Abstract
Abstract An energy display apparatus for plasma loss and plasma shift measurements. The electron beam transmitted through a thin foil alloy specimen at various irradiating points of a uniform energy electron beam is analyzed and the distribution is displayed on the screen of a cathode-ray tube. The base line of the energy distribution curve on the screen of a cathode-ray tube is shifted according to the location of the irradiating point.
Inventors
- 👤 Yasushi Kokubo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:16
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J37/00; H01J37/252; H01J37/256
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
209 words
In a device for scanning a high energy beam over a specimen in a raster in the X and Y directions by X and Y axis beam deflection devices and detecting a signal indicative of the interaction between the beam and the specimen and producing an image on a C.R.T. by brightness modulation of the intensity of the C.R.T. beam with said detected signal, said C.R.T. having X and Y axis C.R.T. deflection devices synchronized with said X and Y axis beam deflection devices; the improvement comprising an energy analyzer positioned relative to the specimen to detect the distribution of energies of the beam after interaction with the specimens as the analyzer is swept by a sawtooth signal which varies the energy level detected and means associated therewith comprising a step signal generator for stepwise application of deflection signals to the beam deflection device and a sawtooth generator in synchronism with the step signal generator for simultaneously sweeping the X-axis C.R.T. deflection device and the energy analyzer, means for adding the output of the energy analyzer and the step signal generator and applying to the Y-axis C.R.T. deflection device such that energy distribution curves for spaced points on a specimen are displayed on the C.R.T. separated by Y-axis shifts.
Claim 2
Dependent Claim
209 words
In a device for scanning a high energy beam over a specimen in a raster in the X and Y directions by X and Y axis beam deflection devices and detecting a signal indicative of the interaction between the beam and the specimen and producing an image on a C.R.T. by brightness modulation of the intensity of the C.R.T. beam with said detected signal, said C.R.T. having X and Y axis C.R.T. deflection devices synchronized with said X and Y axis beam deflection devices; the improvement comprising an energy analyzer positioned relative to the specimen to detect the distribution of energies of the beam after interaction with the specimens as the analyzer is swept by a sawtooth signal which varies the energy level detected and means associated therewith comprising a step signal generator for stepwise application of deflection signals to the beam deflection device and a sawtooth generator in synchronism with the step signal generator for simultaneously sweeping the X-axis C.R.T. deflection device and the energy analyzer, means for adding the output of the energy analyzer and the step signal generator and applying to the Y-axis C.R.T. deflection device such that energy distribution curves for spaced points on a specimen are displayed on the C.R.T. separated by Y-axis shifts.
Claim 3
Dependent Claim
151 words
A display apparatus for displaying the energy distribution of charged particles, said display apparatus incorporating a means for irradiating a specimen with a primary charged particle beam, a deflecting means for varying the irradiating point on the specimen, an analyzer for analyzing the energy of the secondary charged particles emitted from the specimen or the energy loss of the primary charged particles transmitted through the specimen, and a display means in which the display point in the XY plane is determined by the X-axis control means and the Y-axis control means controlled by the output signal of said analyzer, characterized in that a step signal generator output signal controls said deflecting means digitally, said step signal being applied to Y-axis control means of said display means, and the output signal of sweep signal generator synchronized with said step signal generator controls said analyzer and X-axis control means of said display means.
Claim 4
Dependent Claim
151 words
A display apparatus for displaying the energy distribution of charged particles, said display apparatus incorporating a means for irradiating a specimen with a primary charged particle beam, a deflecting means for varying the irradiating point on the specimen, an analyzer for analyzing the energy of the secondary charged particles emitted from the specimen or the energy loss of the primary charged particles transmitted through the specimen, and a display means in which the display point in the XY plane is determined by the X-axis control means and the Y-axis control means controlled by the output signal of said analyzer, characterized in that a step signal generator output signal controls said deflecting means digitally, said step signal being applied to Y-axis control means of said display means, and the output signal of sweep signal generator synchronized with said step signal generator controls said analyzer and X-axis control means of said display means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-09-29 | 1979-03-31 | 1979-09-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-09-29 | 1983-03-31 | 1983-09-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-09-29 | 1987-03-31 | 1987-09-30 | $7700.00 | Window Closed / Lapsed |