Patent US4119985A successfully refreshed from Google Patents.
Patent US3885157A successfully refreshed from Google Patents.
US3885157A
Expired / Lapsed
US
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Electron beam image processing device
Assignee: ELECTRON OPTICAL RESEARCH AND
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Filing: 1973-12-12
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Granted: 1975-05-20
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Expires: 1993-12-12
Abstract
Abstract A device containing and providing selection between a plurality of electron beam processing units is located in the vacuum chamber of a microscope, so that the latter can be used in a wide variety of applications without breaking the vacuum.
Inventors
- 👤 Klaus Heinemann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 08:25
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/22; H01J37/244; H01J2237/00; H01J2237/244; H01J2237/2444; H01J2237/245; H01J2237/24507
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
179 words
Device for analysis of corpuscular rays, such as an electron beam after the beam has left the specimen stage of a transmission electron microscope, the device comprising: a chamber having walls enclosing a space relatively devoid of matter, a portion of the chamber adapted to admit incoming corpuscular rays, such as an electron beam; a plurality of spaced electron-beam processing units located within the chamber, the units comprising: a first processing unit comprising: a phosphor screen having a relatively small hole extending through a portion thereof; and, a single channel electron multiplier aligned with the hole, with the screen located in front of the multiplier relative to an incoming electron beam; a second processing unit comprising: a plurality of spaced multichannel electron multipliers; and a phosphor screen, with the multipliers located in front of the screen relative to an incoming electron beam; a third processing unit comprising a phosphor screen: means for selecting a processing unit and aligning said unit with an electron beam in the chamber; and means for selectively applying voltage potentials to a selected processing unit.
Claim 2
Dependent Claim
179 words
Device for analysis of corpuscular rays, such as an electron beam after the beam has left the specimen stage of a transmission electron microscope, the device comprising: a chamber having walls enclosing a space relatively devoid of matter, a portion of the chamber adapted to admit incoming corpuscular rays, such as an electron beam; a plurality of spaced electron-beam processing units located within the chamber, the units comprising: a first processing unit comprising: a phosphor screen having a relatively small hole extending through a portion thereof; and, a single channel electron multiplier aligned with the hole, with the screen located in front of the multiplier relative to an incoming electron beam; a second processing unit comprising: a plurality of spaced multichannel electron multipliers; and a phosphor screen, with the multipliers located in front of the screen relative to an incoming electron beam; a third processing unit comprising a phosphor screen: means for selecting a processing unit and aligning said unit with an electron beam in the chamber; and means for selectively applying voltage potentials to a selected processing unit.
Claim 3
Dependent Claim
38 words
Device of claim 1 wherein said means for selecting and aligning a processing unit comprises a moveable platform within which said processing units are mounted, and a lever mechanically coupled to the platform and extending outside the chamber.
Claim 4
Dependent Claim
20 words
Device of claim 2 wherein the lever is mechanically coupled by a gear mechanism, and the platform has longitudinal movement.
Claim 5
Dependent Claim
14 words
Device of claim 1 wherein said chamber is a portion of an electron microscope.
Claim 6
Dependent Claim
12 words
Device of claim 2 wherein the moveable platform comprises a rotatable turntable.
Claim 7
Dependent Claim
33 words
Device of claim 1 wherein said voltage potential applying means comprises a plurality of spaced electrical leads electrically coupled between an external power source and electrical terminals of processing units within the chamber.
Claim 8
Dependent Claim
35 words
Device of claim 1 further defined by a portion of one wall of the chamber comprising transparent material, so that an image produced by an electron-beam processing unit can be viewed external to the chamber.
Claim 9
Dependent Claim
34 words
Device of claim 1 further defined by a deflection means located along a portion of the chamber adapted to admit incoming electron beams, and means for selectively applying voltage potentials to the deflection means.
Claim 10
Dependent Claim
14 words
Device of claim 8 wherein the deflection means comprises a plurality of spaced coils.
Claim 11
Dependent Claim
15 words
Device of claim 8 wherein the deflection means comprises a plurality of spaced conductive plates.
Claim 12
Dependent Claim
27 words
Device of claim 8 wherein the voltage potential applying means comprises spaced leads electrically coupled between an external power source and electrical terminals of the deflection means.
Claim 13
Dependent Claim
53 words
Device of claim 11 further defined by a multiposition switch located outside the chamber, and having output terminals electrically coupled to the electrical leads, so that when potentials of different magnitudes are applied to the input terminals of the switch, the position of the switch controls the potential applied to the deflection means.
Claim 14
Dependent Claim
23 words
Device of claim 12 further defined by a timer coupled to the switch to move periodically the switch through each of its positions.
Claim 15
Dependent Claim
85 words
Method of selecting between electron beam processing units for use in an electron microscope without breaking the vacuum in the chamber thereof, the steps comprising: modifying a portion of the microscope chamber; mounting a plurality of electron beam processing units onto a movable platform having a lever mechanically coupled thereto; inserting a movable platform into the modified portion of the chamber so that the lever extends outside the chamber; and, moving the lever so as to align a processing unit with an incoming electron beam.
Claim 16
Dependent Claim
85 words
Method of selecting between electron beam processing units for use in an electron microscope without breaking the vacuum in the chamber thereof, the steps comprising: modifying a portion of the microscope chamber; mounting a plurality of electron beam processing units onto a movable platform having a lever mechanically coupled thereto; inserting a movable platform into the modified portion of the chamber so that the lever extends outside the chamber; and, moving the lever so as to align a processing unit with an incoming electron beam.
Claim 17
Dependent Claim
42 words
An electron image processing device for use in an electron beam instrument, the device comprising: a microdensitometer unit; an image intensifier unit; a transmission phosphor screen unit; and, a moveable platform within which each of the units is mounted and spaced apart.
Claim 18
Dependent Claim
42 words
An electron image processing device for use in an electron beam instrument, the device comprising: a microdensitometer unit; an image intensifier unit; a transmission phosphor screen unit; and, a moveable platform within which each of the units is mounted and spaced apart.
Claim 19
Dependent Claim
47 words
Device of claim 15 wherein the microdensitometer unit comprises: a phosphor screen having a relatively small hole extending through a portion thereof; and, a single channel electron multiplier aligned with the hole, with the screen located in front of the multiplier relative to an incoming electron beam.
Claim 20
Dependent Claim
36 words
Device of claim 15 wherein the image intensifier unit comprises: a plurality of spaced multichannel electron multipliers; and, a phosphor screen, with the multipliers located in front of the screen relative to an incoming electron beam.
Claim 21
Dependent Claim
42 words
A microdensitometer device comprising: a phosphor screen having a relatively small hole extending through a portion thereof; and, a single channel electron multiplier aligned with the hole, with the screen located in front of the multiplier relative to an incoming electron beam.
Claim 22
Dependent Claim
42 words
A microdensitometer device comprising: a phosphor screen having a relatively small hole extending through a portion thereof; and, a single channel electron multiplier aligned with the hole, with the screen located in front of the multiplier relative to an incoming electron beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-05-19 | 1978-11-18 | 1979-05-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-05-19 | 1982-11-18 | 1983-05-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-05-19 | 1986-11-18 | 1987-05-20 | $7700.00 | Window Closed / Lapsed |