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US3874922A
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Tantalum thin film resistors by reactive evaporation
Assignee: Boeing Co
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Filing: 1973-08-16
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Granted: 1975-04-01
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Expires: 1993-08-16
Abstract
Abstract In a process of forming tantalum thin film resistors on a substrate by reactive evaporation, the present invention discloses a method for controlling product repeatability to close tolerances by controlling the substrate temperature and substituting a high water partial pressure for standard inert and reactive gaseous environments.
Inventors
- 👤 Reid A Mickelsen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 11:12
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/22; C23C14/54; C23C14/541; H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/08
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
72 words
IN PROCESS FOR THE DEPOSITION OF TANTALUM ON A SUBSTRATE BY AN EVAPORATIVE PROCESS WITHIN A SUBSTANTIALLY EVACUATED CHAMBER FOR THE PURPOSE OF FORMING RESISTIVE ELEMENTS OF ELECTRONIC CIRCUITS UPON THE SUBSTRATE, A METHOD OF CONTROLLING THE RESISTIVE VALUE AND THE REPEATIBILITY OF THE RESISTIVE VALUE OF THE RESISTIVE ELEMENTS THUS FORMED BY CONTROLLING THE SUBSTRATE TEMPERATURE AND THE RESIDUAL WATER PARTIAL PRESSURE WITHIN THE SUBSTANTIALLY EVACUATED CHAMBER ACCORDING TO THE RELATIONSHIP:
Claim 2
Dependent Claim
72 words
IN PROCESS FOR THE DEPOSITION OF TANTALUM ON A SUBSTRATE BY AN EVAPORATIVE PROCESS WITHIN A SUBSTANTIALLY EVACUATED CHAMBER FOR THE PURPOSE OF FORMING RESISTIVE ELEMENTS OF ELECTRONIC CIRCUITS UPON THE SUBSTRATE, A METHOD OF CONTROLLING THE RESISTIVE VALUE AND THE REPEATIBILITY OF THE RESISTIVE VALUE OF THE RESISTIVE ELEMENTS THUS FORMED BY CONTROLLING THE SUBSTRATE TEMPERATURE AND THE RESIDUAL WATER PARTIAL PRESSURE WITHIN THE SUBSTANTIALLY EVACUATED CHAMBER ACCORDING TO THE RELATIONSHIP:
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-03-31 | 1978-09-30 | 1979-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-03-31 | 1982-09-30 | 1983-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-03-31 | 1986-09-30 | 1987-04-01 | $7700.00 | Window Closed / Lapsed |