US3589994A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering technique
Assignee: AT&T Inc
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Filing: 1968-01-31
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Granted: 1971-06-29
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Expires: 1988-01-31
Abstract
Abstract THE ELECTRICAL AND PHYSICAL PROPERTIES OF CATHODICALLY SPUTTERED FILMS MAY BE CONTROLLED BY UTILIZING EITHER ELECTRON OR NEGATIVE ION BOMBARDMENT OR ALTERNATIVELY, ELECTRON OR NEGATIVE ION, AND POSITIVE ION BOMBARDMENT OF SUBSTRATE SURFACES DURING THE COURSE OF THE SPUTTERING PROCESS.
Inventors
- 👤 Newton Schwartz
- 👤 Frederick Vratny
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:36
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35
Claims Analysis
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-28 | 1974-12-28 | 1975-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-28 | 1978-12-28 | 1979-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-28 | 1982-12-28 | 1983-06-29 | $7700.00 | Window Closed / Lapsed |