Heating arrangement with focused electron beams under vacuum

Claim 2

A heating arrangement comprising, in combination, a source of focused electron beam means under vacuum having a heating cathode and focusing means; electro-magnetic deflection means for deflecting and guiding said beam means along arc-shaped trajectories through an opening and a predetermined angle and onto a predetermined target surface; at least two pole piece systems in said electro-magnetic deflection means for establishing different magnetic fields, one of said pole piece systems having a predetermined shape with inclined surfaces forming a substantially V-shaped channel, whereby the field intensity of said one pole piece system decreases from the inner edge of said beam means to the outer edge of said beam means in the plane of said trajectories; and an auxiliary pole piece system having an axis directed perpendicular to the plane of said trajectories and arranged behind said cathode when viewed from said target surface, said auxiliary pole piece system having a predetermined shape with exit surfaces which are inclined in the direction toward said opening, whereby the field intensity of said auxiliary pole piece system decreases from the outer edge of said beam means to the inner edge of said beam means in the plane of said trajectories.

Claim 3

A heating arrangement comprising, in combination, a source of focused electron beam means under vacuum having a heating cathode and focusing means; electromagnetic deflection means for deflecting and guiding said beam means along arc-shaped trajectories through an opening and a predetermined angle and onto a predetermined target surface; at least two pole piece systems in said electromagnetic deflection means for establishing different magnetic fields, one of said pole piece systems having a predetermined shape with inclined surfaces forming a substantially V-shaped channel, whereby the field intensity of said one-pole piece system decreases from the inner edge of said beam means to the outer edge of said beam means in the plane of said trajectories; and an auxiliary pole piece system having an axis directed perpendicular to the plane of said trajectories and arranged behind said cathode when viewed froms said target surface, said auxiliary pole piece system having a predetermined shape with exit surfaces which are inclined in the direction toward said opening, whereby the field intensity of said auxiliary pole piece system decreases from the outer edge of said beam means to the inner edge of said beam means in the plane of said trajectories, said auxiliary pole piece system comprising two angled elements, each element being the mirror image of the other element, one end of said elements being magnetically coupled with a pole piece of said one pole piece system, the free ends of said elements forming pole pieces lying opposite to each other, said oppositely lying pole pieces having inclined ends.

Claim 4

A heating arrangement comprising, in combination, a source of focused electron beam means under vacuum having a heating cathode and focusing means; electromagnetic deflection means for deflecting and guiding said beam means along arc-shaped trajectories through an opening and a predetermined angle and onto a predetermined target surface; at least two pole piece systems in said electromagnetic deflection means for establishing different magnetic fields, one of said pole piece systems having a predetermined shape with inclined surfaces forming a substantially V-shaped channel, whereby the field intensity of said one-pole piece system decreases from the inner edge of said beam means to the outer edge of said beam means in the plane of said trajectories; and an auxiliary pole piece system having an axis directed perpendicular to the plane of said trajectories and arranged behind said cathode when viewed froms said target surface, said auxiliary pole piece system having a predetermined shape with exit surfaces which are inclined in the direction toward said opening, whereby the field intensity of said auxiliary pole piece system decreases from the outer edge of said beam means to the inner edge of said beam means in the plane of said trajectories, said auxiliary pole piece system comprising two angled elements, each element being the mirror image of the other element, one end of said elements being magnetically coupled with a pole piece of said one pole piece system, the free ends of said elements forming pole pieces lying opposite to each other, said oppositely lying pole pieces having inclined ends.

Claim 5

A heating arrangement comprising, in combination, a source of focused electron beam means under vacuum having a heating cathode and focusing means; electromagnetic deflection means for deflecting and guiding said beam means along arc-shaped trajectories through an opening and a predetermined angle and onto a predetermined target surface; at least two pole piece systems in said electromagnetic deflection means for establishing different magnetic fields, one of said pole piece systems having a predetermined shape with inclined surfaces forming a substantially V-shaped channel, whereby the field intensity of said one pole piece system decreases from the inner edge of said beam means to the outer edge of said beam means in the plane of said trajectories; and an auxiliary pole piece syStem having an axis directed perpendicular to the plane of said trajectories and arranged behind said cathode when viewed from said target surface, said auxiliary pole piece system having a predetermined shape with exit surface which are inclined in the direction toward said opening, whereby the field intensity of said auxiliary pole piece system decreases from the outer edge of said beam means to the inner edge of said beam means in the plane of said trajectories, said cathode having two substantially parallel coducting elements, said elements being parallel to the emission surface of said cathode; two contact plates electrically isolated from each other and secured to said parallel elements, said contact plates being electrically connected to said parallel elements; and isolating means for electrically isolating said contact plates, said isolating means, contact plates and cathode forming a removable assembly.

Claim 6

A heating arrangement comprising, in combination, a source of focused electron beam means under vacuum having a heating cathode and focusing means; electromagnetic deflection means for deflecting and guiding said beam means along arc-shaped trajectories through an opening and a predetermined angle and onto a predetermined target surface; at least two pole piece systems in said electromagnetic deflection means for establishing different magnetic fields, one of said pole piece systems having a predetermined shape with inclined surfaces forming a substantially V-shaped channel, whereby the field intensity of said one pole piece system decreases from the inner edge of said beam means to the outer edge of said beam means in the plane of said trajectories; and an auxiliary pole piece syStem having an axis directed perpendicular to the plane of said trajectories and arranged behind said cathode when viewed from said target surface, said auxiliary pole piece system having a predetermined shape with exit surface which are inclined in the direction toward said opening, whereby the field intensity of said auxiliary pole piece system decreases from the outer edge of said beam means to the inner edge of said beam means in the plane of said trajectories, said cathode having two substantially parallel coducting elements, said elements being parallel to the emission surface of said cathode; two contact plates electrically isolated from each other and secured to said parallel elements, said contact plates being electrically connected to said parallel elements; and isolating means for electrically isolating said contact plates, said isolating means, contact plates and cathode forming a removable assembly.

Claim 7

The arrangement as defined in claim 2 wherein said inclined ends include an angle within the range of 60* to 120*.

Claim 8

The arrangement as defined in claim 2 wherein the perpendiculus to the surfaces of said inclined ends are substantially perpendicular to the next-lying axis of said beam means.

Claim 9

The arrangement as defined in claim 2 wherein said predetermined angle of deflection is substantially a 180*, said auxiliary pole piece system being arranged behind the axis of symmetry through said cathode when viewed from said target surface, said inclined ends being perpendicular and being one-third to two-thirds of the distance between said cathode and the target end point of the arc-shaped axis of said beam means.

Claim 10

The arrangement as defined in claim 3 including electrically conducting means passing through one of said contact plates to the emission surface of said cathode, said one contact plate being electrically isolated from said conducting means, said conducting means being electrically connected to the other one of said contact plates, the planes of said contact plates being parallel relative to each other and being perpendicular to the axis of symmetry of said cathode.

Claim 11

The arrangement as defined in claim 7 including screw means for fastening in place said removable assembly, the axis of said screw means being parallel to the axis of symmetry of said cathode.

Claim 12

The arrangement as defined in claim 8 including electrical terminal means on said contact plates for connecting to electrical conducting means.

Claim 13

The arrangement as defined in claim 1 wherein said predetermined angle of deflection is substantially 90* and above.