US3710072A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor source assembly
Assignee: Airco Inc
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Filing: 1971-05-10
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Granted: 1973-01-09
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Expires: 1991-05-10
Abstract
Abstract A vapor source assembly is described in which an electron beam is deflected in an arcuate path by a main magnetic field from an electron beam gun positioned below the level of the crucible to impinge upon the top surface of material in the crucible. A second magnetic field is produced within the first magnetic field and has lines of force of variable orientation to provide a controllable variation in beam deflection so that the beam may be swept upon the surface of the material contained in the crucible.
Inventors
- 👤 R Shrader
- 👤 K Tsujimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:57
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
238 words
A vapor source assembly comprising, means forming a crucible for containing material to be vaporized, an electron beam gun positioned below the level of said crucible for producing an electron beam directed, initially, in a direction away from the material to be vaporized, deflecting means for producing a main magnetic field having lines of force extending generally transversely of the initial electron beam direction to deflect the electron beam produced by said electron beam gun through an arcuate path from said electron beam gun to said crucible, said deflecting means including a pair of pole plates arranged substantially parallel with each other on opposite sides of said crucible, said pole plates being of a configuration such that said main magnetic field is of generally uniform strength in the region of said electron beam gun and in the region of said crucible, and sweeping means including a plurality of coils positioned on coplanar axes between said pole plates and oriented for producing a sweeping magnetic field when said coils are energized with variable currents, said sweeping field being substantially smaller than said main magnetic field and having lines of force of variable orientation within said main magnetic field to provide a controllable variation in beam deflection, said sweeping means being positioned closer to said electron beam gun than to said crucible with respect to the total amount of deflection of the electron beam produced by said electron beam gun.
Claim 2
Dependent Claim
238 words
A vapor source assembly comprising, means forming a crucible for containing material to be vaporized, an electron beam gun positioned below the level of said crucible for producing an electron beam directed, initially, in a direction away from the material to be vaporized, deflecting means for producing a main magnetic field having lines of force extending generally transversely of the initial electron beam direction to deflect the electron beam produced by said electron beam gun through an arcuate path from said electron beam gun to said crucible, said deflecting means including a pair of pole plates arranged substantially parallel with each other on opposite sides of said crucible, said pole plates being of a configuration such that said main magnetic field is of generally uniform strength in the region of said electron beam gun and in the region of said crucible, and sweeping means including a plurality of coils positioned on coplanar axes between said pole plates and oriented for producing a sweeping magnetic field when said coils are energized with variable currents, said sweeping field being substantially smaller than said main magnetic field and having lines of force of variable orientation within said main magnetic field to provide a controllable variation in beam deflection, said sweeping means being positioned closer to said electron beam gun than to said crucible with respect to the total amount of deflection of the electron beam produced by said electron beam gun.
Claim 3
Dependent Claim
16 words
A vapor source assembly according to claim 1 wherein said deflecting means include a permanent magneT.
Claim 4
Dependent Claim
55 words
A vapor source assembly according to claim 1 wherein said deflecting means include a permanent magnet extending between said pole plates and positioned adjacent the side of said crucible opposite the electron beam path such that leakage flux from said permanent magnet intercepts secondary electrons emitted from the surface of the material in said crucible.
Claim 5
Dependent Claim
197 words
A vapor source assembly comprising, means forming a crucible for containing material to be vaporized, an electron beam gun positioned below the level of said crucible for producing an electron beam directed, initially, in a direction away from the material in said crucible, a pair of pole plates positioned on opposite sides of said crucible and said electron beam gun in substantially parallel relationship with each other, means for polarizing said pole plates to produce a main magnetic field therebetween, said pole plates extending a sufficient distance in a direction away from said crucible such that the main magnetic field produces deflection of the electron beam produced by said electron beam gun through an arcuate path from said electron beam gun to said crucible, sweeping means for producing a sweeping magnetic field in the path of the electron beam in a region wherein said electron beam has undergone a deflection from the initial path of between 70* and 130*, said sweeping means comprising at least three solenoidal coils arranged with coplanar axes and means for energizing said coils with variable currents to produce variation in the orientation of the lines of force of said sweeping magnetic field.
Claim 6
Dependent Claim
197 words
A vapor source assembly comprising, means forming a crucible for containing material to be vaporized, an electron beam gun positioned below the level of said crucible for producing an electron beam directed, initially, in a direction away from the material in said crucible, a pair of pole plates positioned on opposite sides of said crucible and said electron beam gun in substantially parallel relationship with each other, means for polarizing said pole plates to produce a main magnetic field therebetween, said pole plates extending a sufficient distance in a direction away from said crucible such that the main magnetic field produces deflection of the electron beam produced by said electron beam gun through an arcuate path from said electron beam gun to said crucible, sweeping means for producing a sweeping magnetic field in the path of the electron beam in a region wherein said electron beam has undergone a deflection from the initial path of between 70* and 130*, said sweeping means comprising at least three solenoidal coils arranged with coplanar axes and means for energizing said coils with variable currents to produce variation in the orientation of the lines of force of said sweeping magnetic field.
Claim 7
Dependent Claim
227 words
A vapor source assembly comprising, means forming a crucible for containing material to be vaporized, an electron beam gun positioned below the level of said crucible for producing an electron beam directed, initially, in a direction away from the material to be vaporized, deflecting means for producing a main magnetic field having lines of force extending generally transversely of the initial electron beam direction to deflect the electron beam produced by said electron beam gun through an arcuate path from said electron beam gun to said crucible, said deflecting means being of a configuration such that said main magnetic field is of generally uniform strength in the region of said electron beam gun and in the region of said crucible, and sweeping means producing a sweeping magnetic field substantially smaller than said main magnetic field and having lines of force of variable orientation within said main magnetic field to provide a controllable variation in beam deflection, said sweeping means being positioned closer to said electron beam gun than to said crucible with respect to the total amount of deflection of the electron beam produced by said electron beam gun, said sweeping means including at least three solenoidal coils arranged with coplanar axes, and means for energizing said coils with variable currents to produce variation in the orientation of the lines of force of said sweeping magnetic field.
Claim 8
Dependent Claim
227 words
A vapor source assembly comprising, means forming a crucible for containing material to be vaporized, an electron beam gun positioned below the level of said crucible for producing an electron beam directed, initially, in a direction away from the material to be vaporized, deflecting means for producing a main magnetic field having lines of force extending generally transversely of the initial electron beam direction to deflect the electron beam produced by said electron beam gun through an arcuate path from said electron beam gun to said crucible, said deflecting means being of a configuration such that said main magnetic field is of generally uniform strength in the region of said electron beam gun and in the region of said crucible, and sweeping means producing a sweeping magnetic field substantially smaller than said main magnetic field and having lines of force of variable orientation within said main magnetic field to provide a controllable variation in beam deflection, said sweeping means being positioned closer to said electron beam gun than to said crucible with respect to the total amount of deflection of the electron beam produced by said electron beam gun, said sweeping means including at least three solenoidal coils arranged with coplanar axes, and means for energizing said coils with variable currents to produce variation in the orientation of the lines of force of said sweeping magnetic field.
Claim 9
Dependent Claim
66 words
A vapor source assembly according to claim 5 wherein two of said solenoidal coils are arranged with their axes substantially parallel with each other in spaced relationship on opposite sides of the electron beam path, and wherein the third of said solenoidal coils is arranged with its axis substantially perpendicular to the axes of the other of said solenoidal coils, forming a generally U-shaped assembly therewith.
Claim 10
Dependent Claim
18 words
A vapor source assembly according to claim 6 wherein said two parallel solenoidal coils are connected in series.
Claim 11
Dependent Claim
29 words
A vapor source assembly according to claim 6 wherein said crucible forming means include socket means for receiving said U-shaped coil assembly and supporting same in an operative position.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-01-09 | 1976-07-10 | 1977-01-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-01-09 | 1980-07-10 | 1981-01-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-01-09 | 1984-07-10 | 1985-01-09 | $7700.00 | Window Closed / Lapsed |