US3864174A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacturing semiconductor device
Assignee: Individual
•
Filing: 1973-01-22
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Granted: 1975-02-04
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Expires: 1993-01-22
Abstract
Abstract A method for manufacturing semiconductor devices characterized in that a semiconductor element is fabricated, lifetime killers are introduced into the element by diffusion or like, and the element is thereafter subjected to an irradiation of electrons of an energy ranging from 0.1 to 5.0 Mev.
Inventors
- 👤 Nobuyuki Akiyama
- 👤 Shunji Miura
- 👤 Haruo Chisaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:34
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/83; H10D62/834; H10P; H10P34/00; H10P34/40; Y; Y10; Y10S; Y10S148/00; Y10S148/023; Y10S148/062
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
45 words
A METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE CHARACTERIZED IN THAT A SEMICONDUCTOR ELEMENT IS FABRICATED, LIFETIME KILLERS ARE INTRODUCED INTO THE ELEMENT BY DIFFUSION OR LIKE, AND THE ELEMENT IS THEREAFTER SUBJECTED TO AN IRRADIATION OF ELECTRONS OF AN ENERGY FRNGING FROM 0.1 TO 5.0 MEV.
Claim 2
Independent Claim
45 words
A METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE CHARACTERIZED IN THAT A SEMICONDUCTOR ELEMENT IS FABRICATED, LIFETIME KILLERS ARE INTRODUCED INTO THE ELEMENT BY DIFFUSION OR LIKE, AND THE ELEMENT IS THEREAFTER SUBJECTED TO AN IRRADIATION OF ELECTRONS OF AN ENERGY FRNGING FROM 0.1 TO 5.0 MEV.
Claim 3
Dependent Claim
30 words
A method as stated in claim 1, characterized in that the semiconductor element is subjected to an irradiation of electrons from outside of a capsule thereby the lifetime is controlled.
Claim 4
Dependent Claim
44 words
A method as stated in claim 1, characterized in that a masking pattern is placed on a semiconductor element and that the masking surface of said element is subjected to an irradiation of electrons thereby the positional control of the lifetime is carried out.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-02-03 | 1978-08-05 | 1979-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-02-03 | 1982-08-05 | 1983-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-02-03 | 1986-08-05 | 1987-02-04 | $7700.00 | Window Closed / Lapsed |