Patent US3853740A successfully refreshed from Google Patents.
US3853740A
Expired / Lapsed
US
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Target changer for sputtering by ionic bombardment
Assignee: Balzers Patent und Beteiligungs AG
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Filing: 1973-04-05
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Granted: 1974-12-10
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Expires: 1993-04-05
Abstract
Abstract A target changer for positioning targets which are to be subjected to electronic sputtering by ionic bombardment comprises a movable support for carrying the target with a cover mounted on the support by electrical insulation means and which comprises an ion shielding electrode which is capable of being charged with a positive potential relative to the target.
Inventors
- 👤 A Kunz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:44
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7618; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; H10P72/7621; H10P72/7622
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
78 words
A target changer for positioning targets which are to be subjected to cathode sputtering by ions, comprising a movable support for carrying a target, a cover comprising an ion shielding electrode, means adapted to supply a positive potential to said cover relative to the target said cover overlying said support but exposing at least a portion of the target thereon, electrical insulation means supporting said cover on said support, and mounting means for supporting said support for movement.
Claim 2
Dependent Claim
78 words
A target changer for positioning targets which are to be subjected to cathode sputtering by ions, comprising a movable support for carrying a target, a cover comprising an ion shielding electrode, means adapted to supply a positive potential to said cover relative to the target said cover overlying said support but exposing at least a portion of the target thereon, electrical insulation means supporting said cover on said support, and mounting means for supporting said support for movement.
Claim 3
Dependent Claim
28 words
A target changer according to claim 1, wherein said movable support comprises a rotary table, means for rotating said table and a voltage lead connected to said cover.
Claim 4
Dependent Claim
62 words
A target changer according to claim 2, including a housing with an upper part surrounding said table and said cover and a lower skirt portion, an insulating ring disposed between said upper part of said housing and said lower skirt portion and rotatably supporting said table for movement, and a high voltage terminal connected to said rotary table and the target thereon.
Claim 5
Dependent Claim
15 words
A target changer according to claim 1, wherein said movable support is a rotatable turntable.
Claim 6
Dependent Claim
15 words
A target changer according to claim 1, wherein said movable support comprises a rotatable drum.
Claim 7
Dependent Claim
23 words
A target changer according to claim 1, including a fixed mask mounted over said cover having an opening for exposing a particular target.
Claim 8
Dependent Claim
62 words
A target changer for sputtering by means of ions, comprising a rotatable support for several targets, a cover overlying said support and provided with at least one opening for exposing a target to sputtering, said cover being an ion-shielding electrode movable with said support, but electrically insulated therefrom and including means adapted to apply a positive potential thereto relative to said targets.
Claim 9
Dependent Claim
62 words
A target changer for sputtering by means of ions, comprising a rotatable support for several targets, a cover overlying said support and provided with at least one opening for exposing a target to sputtering, said cover being an ion-shielding electrode movable with said support, but electrically insulated therefrom and including means adapted to apply a positive potential thereto relative to said targets.
References Cited (Backward Citations)
US3528906A
Cited
US3537973A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-09 | 1978-06-10 | 1978-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-09 | 1982-06-10 | 1982-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-09 | 1986-06-10 | 1986-12-10 | $7700.00 | Window Closed / Lapsed |