US3528906A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rf sputtering method and system
Assignee: Texas Instruments Inc
•
Filing: 1967-06-05
•
Granted: 1970-09-15
•
Expires: 1987-06-05
Abstract
No abstract record available.
Inventors
- 👤 John H Cash Jr
- 👤 James A Cunningham
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 03:00
CPC Classifications
H; H10; H10P; H10P95/00; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H10W; H10W74/00; H10W74/40
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
CA702672A
Cited
US3267015A
Cited
US3347772A
Cited
US3369991A
Cited
US3410774A
Cited
US3361659A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-09-14 | 1974-03-16 | 1974-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-09-14 | 1978-03-16 | 1978-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-09-14 | 1982-03-16 | 1982-09-15 | $7700.00 | Window Closed / Lapsed |