Patent US3816906A successfully refreshed from Google Patents.
US3816906A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of dividing mg-al spinel substrate wafers coated with semiconductor material and provided with semiconductor components
Assignee: Siemens AG
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Filing: 1973-02-26
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Granted: 1974-06-18
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Expires: 1993-02-26
Abstract
Abstract Process of dividing a plurality of semiconductor components on a Mg-Al spinel substrate, coated with semiconductor material. The process comprises providing the spinel substrate wafer, prior to the production of the individual semiconductor elements, with a marking which indicates the <100> directions, producing the semiconductor elements so that their boundaries are parallel to the marked <100 > directions, scoring and mechanically dividing the entire substrate wafer into individual components along these lines.
Inventors
- 👤 R Falckenberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 07:39
CPC Classifications
B; B28; B28D; B28D5/00; B28D5/0005; B28D5/0011; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/028; Y10S148/051; Y10S148/115; Y10S148/15
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
33 words
The method of claim 1, wherein a (100) oriented surface of said pinel spinel wafer is used and the scored lines and boundary lines are parallel to the 100 directions of the substrate.
Claim 2
Dependent Claim
21 words
The method of claim 1, wherein the epitaxially grown layer is selected from silicon, germanium, an AIIIBV compound and silicon carbide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-06-17 | 1977-12-17 | 1978-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-06-17 | 1981-12-17 | 1982-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-06-17 | 1985-12-17 | 1986-06-18 | $7700.00 | Window Closed / Lapsed |