US3798447A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for directing an energizing beam on a sample to cause secondary ion emission
Assignee: Office National d'Études et de Recherches Aérospatiales
•
Filing: 1971-05-17
•
Granted: 1974-03-19
•
Expires: 1991-05-17
Abstract
Abstract Two enclosures are separated by a diaphragm; one of them contains means for producing a beam of primary ions and the other contains means for focusing the beam of primary ions and the secondary beam emitted by the sample. Means for scanning the sample with the primary beam are provided. The device enables high resolution in spectral analyses.
Inventors
- 👤 P Lanusse
- 👤 R Hernandez
- 👤 G Slodzian
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:13
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/02; H01J49/10; H01J49/14; H01J49/142
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
120 words
Mass spectrometric analysis apparatus comprising a chamber for ionic emission energization containing at least one solid sample for spectral mass analysis thereof, said chamber including means for directing a primary, energizing beam upon said sample so that said sample emits a secondary ion beam and a metallic diaphragm positioned parallel to and closely adjacent the face of the sample upon which said primary beam is directed, said metallic diaphragm having an orifice therein defining a passage for said primary beam substantially the size of the surface of said sample impinged by said beam and for said secondary ion beam emitted by said sample, said apparatus further comprising means for maintaining said metallic diaphragm at the same potential as the sample.
Claim 2
Dependent Claim
120 words
Mass spectrometric analysis apparatus comprising a chamber for ionic emission energization containing at least one solid sample for spectral mass analysis thereof, said chamber including means for directing a primary, energizing beam upon said sample so that said sample emits a secondary ion beam and a metallic diaphragm positioned parallel to and closely adjacent the face of the sample upon which said primary beam is directed, said metallic diaphragm having an orifice therein defining a passage for said primary beam substantially the size of the surface of said sample impinged by said beam and for said secondary ion beam emitted by said sample, said apparatus further comprising means for maintaining said metallic diaphragm at the same potential as the sample.
Claim 3
Dependent Claim
17 words
Analysis apparatus in accordance with claim 1, wherein the metallic diaphragm is formed of a mono-isotopic metal.
Claim 4
Dependent Claim
15 words
Analysis apparatus in accordance with claim 2, wherein said metallic diaphragm is formed of tantalum.
Claim 5
Dependent Claim
15 words
Analysis apparatus in accordance with claim 2, wherein said metallic diaphragm is formed of gold.
Claim 6
Dependent Claim
107 words
Mass spectrometric analysis apparatus according to claim 1, comprising means for deflecting said primary beam, said deflecting means comprising first and second pairs of electrodes located so as to act on said primary beam in mutually perpendicular planes, means for applying a potential of variable amplitude and a first frequency to said first pair of electrodes, means for applying a potential of variable amplitude and a second, different frequency to said second pair of electrodes, and means for controlling the amplitude of said potentials so that the primary beam sweeps an area on the surface of the sample substantially the size of said orifice in said diaphragm.
Claim 7
Dependent Claim
37 words
Mass spectrometric analysis apparatus according to claim 1, comprising a cryogenic container located adjacent the sample around said primary beam and said secondary ion beam emitted by said sample, said cyrogenic container being filled with liquified gas.
Claim 8
Dependent Claim
105 words
Mass spectrometric analysis apparatus comprising a chamber for ionic emission energization containing at least one solid sample for spectral mass analysis thereof, said chamber including means for directing a primary, energizing beam upon the sample so that said sample omits a secondary ion beam and a sample carrier for supporting the sample so that one face thereof is exposed to the primary beam and another surface of said sample opposed to said exposed surface is free, said chamber further containing an electron gun so located as to direct an electron beam against said another surface of the sample for providing localized heating of the sample.
Claim 9
Dependent Claim
105 words
Mass spectrometric analysis apparatus comprising a chamber for ionic emission energization containing at least one solid sample for spectral mass analysis thereof, said chamber including means for directing a primary, energizing beam upon the sample so that said sample omits a secondary ion beam and a sample carrier for supporting the sample so that one face thereof is exposed to the primary beam and another surface of said sample opposed to said exposed surface is free, said chamber further containing an electron gun so located as to direct an electron beam against said another surface of the sample for providing localized heating of the sample.
Claim 10
Dependent Claim
38 words
Mass spectrometric analysis apparatus according to claim 7, comprising a cryogenic container located adjacent the sample around said primary beam and said secondary ion beam emitted By said sample, said cryogenic container being filled with a liquified gas.
Claim 11
Dependent Claim
15 words
Analysis apparatus in accordance with claim 8 wherein said cryogenic container is of annular shape.
Claim 12
Dependent Claim
16 words
Analysis apparatus in accordance with claim 8 wherein said cryogenic container is filled with liquid nitrogen.
Claim 13
Dependent Claim
16 words
Analysis apparatus in accordance with claim 8 wherein said cryogenic container is filled with liquid helium.
Claim 14
Dependent Claim
44 words
Mass spectrometric analysis apparatus according to claim 7, comprising deflecting means for deflecting said primary, energizing beam and a neutralizing chamber positioned in the path of said primary beam between said deflecting means and said sample for producing an energizing beam containing neutral particles.
Claim 15
Dependent Claim
33 words
Analysis apparatus in accordance with claim 12 wherein said neutralizing chamber comprises a metal tube filled with a fluid for bombarding the sample with neutral atoms of variable energy obtained by charge exchange.
Claim 16
Dependent Claim
17 words
Analysis apparatus in accordance with claim 7 further comprising a retractable support for mounting said electron gun.
References Cited (Backward Citations)
US3005099A
Cited
US3124680A
Cited
US3415985A
Cited
US3585383A
Cited
US3418465A
Cited
US3517191A
Cited
CH464571A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-03-18 | 1977-09-17 | 1978-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-03-18 | 1981-09-17 | 1982-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-03-18 | 1985-09-17 | 1986-03-19 | $7700.00 | Window Closed / Lapsed |