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US3585383A Expired / Lapsed US ⏱️ 0.0 years remaining

Microanalyzer for producing a characteristic ionic image of a sample surface

Assignee: Centre National de la Recherche Scientifique
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Filing: 1966-01-03
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Granted: 1971-06-15
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Expires: 1986-01-03
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Abstract

Abstract The present invention relates to microanalysers and more particularly to microanalysers making use of the secondary ion emission for producing, by means of a corpuscular optical system which combines ion optics and mass spectrography, ''''characteristic images'''' of the surface of the sample which indicate the map of distribution of its various elements or isotopes.

Inventors

  • 👤 Raymond Castaing
  • 👤 Georges Slodzian

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 23:50
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J37/00; H01J37/02; H01J37/04; H01J37/05; H01J37/252; H01J49/02; H01J49/10; H01J49/14; H01J49/142; H01J49/26; H01J49/28; H01J49/284; H01J49/286; H01J49/466

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 176 words
A microanalyser arrangement for providing a characteristic ionic image of the surface of a sample by bombarding said sample with particles causing the emission of secondary characteristic ions, said arrangement comprising: a primary ion source for bombarding said sample; lens means for concentrating said secondary ions to form a beam providing an ionic image of the sample surface; means positioned in the path of said beam for eliminating, from said beam, ions having an energy higher than a predetermined value, for obtaining an energy filtered beam; magnetic field means positioned in the path of said filtered beam for rejecting therefrom the ions having a momentum different from a predetermined value, said magnetic means having an outlet; and means located at said outlet for displaying said ionic image, wherein said magnetic filed means comprise a magnetic sector and means for controlling the magnetic field in said sector, wherein said eliminating means comprise an ion mirror, said ion mirror comprising means for reflecting ions whose energy is lower than a predetermined level and for eliminating the other ions.
Claim 2
Dependent Claim 21 words
An arrangement as claimed in claim 2, comprising a further magnetic sector positioned for deflecting said beam towards said ion mirror.
Claim 3
Dependent Claim 25 words
An arrangement as claimed in claim 3, wherein said mirror comprises an electrode which collects the ions having an energy higher than said predetermined level.
Claim 4
Dependent Claim 35 words
An arrangement as claimed in claim 3, wherein said mirror comprises an apertured electrode, having a center hole for allowing the ions, whose energy is higher than said predetermined level, to propagate beyond said mirror.

References Cited (Backward Citations)

US3126477A Cited
US2976413A Cited
US2947868A Cited
US3061720A Cited
US3174034A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-06-14 1974-12-14 1975-06-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-06-14 1978-12-14 1979-06-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-06-14 1982-12-14 1983-06-15 $7700.00 Window Closed / Lapsed

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