US3798036A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing microstructures
Assignee: Telefunken Electronic GmbH
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Filing: 1972-03-31
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Granted: 1974-03-19
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Expires: 1992-03-31
Abstract
Abstract A method of manufacturing microstructures on a substrate comprises projecting at least one mask pattern onto a substrate through an objective lens and copying a further mask pattern onto the substrate by a contact process, the contact mask for the contact process being formed by projecting a mask pattern through the same objective lens onto a material for making the contact mask.
Inventors
- 👤 H Schnepf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:54
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/7045; G03F7/20; G03F7/2002; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
27 words
A method as defined in claim 1, wherein said pattern of said contact mask is copied onto a photosensitive layer on said surface of said semiconductor wafer.
Claim 2
Dependent Claim
39 words
A method as defined in claim 2, further comprising the step of coating a metal foil with a photo-varnish, projecting said further mask pattern onto said photo-varnish coating and etching said metal foil to produce said contact mask therefrom.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-03-18 | 1977-09-17 | 1978-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-03-18 | 1981-09-17 | 1982-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-03-18 | 1985-09-17 | 1986-03-19 | $7700.00 | Window Closed / Lapsed |