US3518084A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for etching an opening in an insulating layer without forming pinholes therein
Assignee: International Business Machines Corp
•
Filing: 1967-01-09
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Granted: 1970-06-30
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Expires: 1987-01-09
Abstract
No abstract record available.
Inventors
- 👤 Fred Barson
- 👤 Richard T Kuehn
- 👤 Myron D Palmer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:02
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10P; H10P76/00; H10P76/40; H10P95/00; H10W20/00; H10W20/40
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-06-29 | 1973-12-29 | 1974-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-06-29 | 1977-12-29 | 1978-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-06-29 | 1981-12-29 | 1982-06-30 | $7700.00 | Window Closed / Lapsed |