Abstract A method of fabricating semiconductor devices to facilitate electrical testing at an early stage and before final assembly to heat sinks and the like. A metallic layer is deposited over one surface of a semiconductor wafer having a previously formed internal junction or junctions. The other surface of the wafer is then coated with a chemically impervious protective layer in a grid pattern, and the exposed semiconductive material is chemically cut down to the metallic layer to form islands of junction devices separated by grooves. The grooves are next filled with a protective substance to cover the exposed junctions and the devices are electrically tested. The devices are then separated by mechanically cutting through the grooves and metallic layer, and the acceptable ones are mounted on their final supports or heat sinks.
A method of fabricating finished semi-conductive devices from a semiconductor wafer having an internal junction, comprising: a. depositing a metallic support layer on one surface of the wafer, b. selectively coating one opposite surface of the wafer through a mask in a waffle pattern with a material impervious to cutting and etching chemicals subsequently to be employed, said coating being applied over the areas from which semiconductive devices are to be fabricated, c. chemically cutting grooves through the thickness of the wafer and down to the metallic layer in those areas that were not selectively coated, thereby forming islands of semiconductor devices supported on the metallic layer and separated by intersecting lines of grooves, d. filling the grooves between the islands with a protective substance to cover the exposed junctions in the sides of the devices by placing a mask having holes opposite each groove line intersection over the semiconductor device and applying pressure to the protective substance to force it through the holes into the grooves, and e. mechanically cutting down the middle of the grooves through the protective substance and the metallic layer to separate the semiconductive devices from each other.
Claim 2
Independent Claim
193 words
A method of fabricating finished semi-conductive devices from a semiconductor wafer having an internal junction, comprising: a. depositing a metallic support layer on one surface of the wafer, b. selectively coating one opposite surface of the wafer through a mask in a waffle pattern with a material impervious to cutting and etching chemicals subsequently to be employed, said coating being applied over the areas from which semiconductive devices are to be fabricated, c. chemically cutting grooves through the thickness of the wafer and down to the metallic layer in those areas that were not selectively coated, thereby forming islands of semiconductor devices supported on the metallic layer and separated by intersecting lines of grooves, d. filling the grooves between the islands with a protective substance to cover the exposed junctions in the sides of the devices by placing a mask having holes opposite each groove line intersection over the semiconductor device and applying pressure to the protective substance to force it through the holes into the grooves, and e. mechanically cutting down the middle of the grooves through the protective substance and the metallic layer to separate the semiconductive devices from each other.
Claim 3
Dependent Claim
50 words
A method as defined in claim 1, further including the step of electrically testing each semiconductor device while it is laterally insulated from adjacent devices by the protective substance applied in subparagraph (d) and before it is separated from the adjacent devices by the mechanical cutting recited in sub-paragraph e).
Claim 4
Dependent Claim
39 words
A method as defined in claim 2, wherein the testing is implemented by applying a first test electrode to the metallic support layer and then successively applying a second test electrode to the top part of each semiconductor device.