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Method of producing a pnp silicon transistor

Assignee: Siemens AG
•
Filing: 1971-02-19
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Granted: 1974-02-12
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Expires: 1991-02-19
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Abstract

Abstract During the production of a pnp silicon transistor, one side of a p-conducting silicon wafer is provided with a base zone through masked diffusion of phosphorus atoms. A subsequent diffusion process increases the phosphorus concentration at the surface of the base zone to 1020 to 1021 phosphorous atoms/cm3. The same phosphorus concentration is produced at the opposite side of the silicon wafer. The emitter is produced in the region of the base zone through a masked diffusion of acceptor atoms. Finally, the phosphorus-doped layer is removed from the reverse or back side of the semiconductor wafer.

Inventors

  • 👤 W Muller
  • 👤 J Dathe
  • 👤 L Grasser

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 03:06
CPC Classifications
H; H10; H10P; H10P95/00; H10P32/00; H10P32/10; H10P32/12; H10P32/17; H10P32/171; H10W; H10W74/00; H10W74/40; H10W74/43; Y; Y10; Y10S; Y10S438/00; Y10S438/928

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 19 words
The method of claim 1 wherein the indiffusion of the phosphorus is effected at a temperature of about 1050*C.
Claim 2
Dependent Claim 31 words
The method of claim 1, wherein following the last diffusion process, contact points are exposed at the base and the emitter zone and are contacted by a vapor deposited aluminum layer.
Claim 3
Dependent Claim 24 words
The method of claim 3, wherein the aluminum layer is locally vapor-deposited upon the contact points of the base and of the emitter zone.
Claim 4
Dependent Claim 46 words
The method of claim 3, wherein the semiconductor surface provided with the exposed contact points of the base and of the emitter zone, is covered by a total area aluminum metallization by vapor deposition, said metallization is then removed locally by the photo resist etching method.

References Cited (Backward Citations)

US3418181A Cited
US3529347A Cited
US3669768A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-02-11 1977-08-13 1978-02-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-02-11 1981-08-13 1982-02-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-02-11 1985-08-13 1986-02-12 $7700.00 Window Closed / Lapsed

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