Patent US3787252A successfully refreshed from Google Patents.
US3787252A
Expired / Lapsed
US
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Connection means for semiconductor components and integrated circuits
Assignee: Bull HN Information Systems Italia SpA
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Filing: 1971-11-08
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Granted: 1974-01-22
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Expires: 1991-11-08
Abstract
Abstract In a semiconductor wafer having an epitaxial layer on which circuit elements are formed, through-connections for said circuit elements to contacts formed on the opposite surface of the layer are provided by tapered high conductivity semiconductor regions insulated from the body by a thin layer of dielectric material and in contact with suitably doped portions of the epitaxial layer to provide insulation by means of reversely biased junctions.
Inventors
- 👤 F Filippazzi
- 👤 F Forlani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 12:42
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10W10/10; H10W20/00; H10W20/01; H10W20/021; H10W20/023; H10W20/20; H10W70/611; H10W72/00; H10W72/071; H10W72/072; H10W72/07231; H10W72/07236; Y; Y10; Y10S; Y10S148/00; Y10S148/085; Y10S148/122; Y10S148/145; Y10S438/00; Y10S438/928
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
59 words
The method of claim 1, wherein said step of forming at least one hole comprises the step of: etching at least one area of the first surface of the monocrystalline semiconductor wafer so as to form at least one hole; and limiting said etching step to an etching depth less than the total thickness of the monocrystalline semiconductor wafer.
Claim 2
Dependent Claim
55 words
The method of claim 2 whErein said etching step comprises: selectively etching the monocrystalline semiconductor wafer in order to enhance the etching depth in the direction of the wafer thickness in comparison to the directions parallel to the first surface from which said etching step is initiated so as to form a conical shaped hole.
References Cited (Backward Citations)
US3462650A
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US3427709A
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US3343256A
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US3456335A
Cited
US3372070A
Cited
US3440498A
Cited
US3471922A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-21 | 1977-07-23 | 1978-01-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-21 | 1981-07-23 | 1982-01-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-21 | 1985-07-23 | 1986-01-22 | $7700.00 | Window Closed / Lapsed |