Film deposited circuits and devices therefor

Claim 1

A method of making an electrical circuit including a number of electrical impedance-forming passive circuit elements and a number of semiconductor current control devices each of which can be rendered conductive when a voltage applied thereto exceeds a given threshold voltage value, said method comprising the steps of depositing on an insulating base films of conductive material forming said impedance-forming passive elements and conductors extending thereto depositing films of insulating material over the conductor-forming portions of said deposits of conductive material on said insulting base, each of said films of insulating materials having a hole in the same, and depositing over the holes of said films of insulating material films of semiconductor material forming said semiconductor devices which semiconductor material electrically connects various ones of said conductors through said holes, wherein the impedance-forming passive circuit elements and semiconductor current control devices are interconnected to form a substantially all-film electrical circuit.