US3770433A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High sensitivity negative electron resist
Assignee: AT&T Inc
•
Filing: 1972-03-22
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Granted: 1973-11-06
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Expires: 1992-03-22
Abstract
Abstract A technique is described for the generation of a relief image in a sensitive negative electron resist based upon a modified polymer of glycidyl methacrylate alone or in combination with methyl methacrylate and/or ethyl acrylate. The described resist evidences optimum characteristics with respect to sensitivity, adhesion and resolution and is suitable for use as an etch mask in the fabrication of microelectronic devices.
Inventors
- 👤 J Bartelt
- 👤 E Feit
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:58
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/038; G03F7/0388; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
22 words
Technique in accordance with claim 1 wherein at least 5 per cent by weight of the prepolymer is esterified with methacrylic acid.
Claim 2
Dependent Claim
18 words
Technique in accordance with claim 1 wherein the thickness of said coating ranges from 2,000 to 5,000 A.
Claim 3
Dependent Claim
25 words
Technique in accordance with claim 1 wherein said developing solution comprises a solvent selected from the group consisting of ketones, chlorinated hydrocarbons and aromatic hydrocarbons.
Claim 4
Dependent Claim
13 words
Technique in accordance with claim 4 wherein said developer further includes an alcohol.
Claim 5
Dependent Claim
42 words
Technique in accordance with claim 1 wherein said coating is exposed to a patterned source of electrons at an accelerating voltage within the range of from 3 to 20 kilovolts at a dosage greater than 2 X 10 7 coulombs per cm2.
References Cited (Backward Citations)
US2747103A
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US2760863A
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US3418295A
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US3357831A
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US3529960A
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US3594243A
Cited
US3575925A
Cited
US3469982A
Cited
US3702812A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-11-05 | 1977-05-07 | 1977-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-11-05 | 1981-05-07 | 1981-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-11-05 | 1985-05-07 | 1985-11-06 | $7700.00 | Window Closed / Lapsed |