US3594243A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Formation of polymeric resists
Assignee: GAF Chemicals Corp
•
Filing: 1967-02-07
•
Granted: 1971-07-20
•
Expires: 1987-02-07
Abstract
Abstract POLYMERIC RESIST-IMAGE FORMATION INVOLVING THE IRRADIATION OF A MALEIC ANHYDRIDE POLYMER COATING WITH CORPUSCULAR RADIATION, E.B., AN ELECTRON BEAM, WHEREBY TO INSOLUBILIZE THE EXPOSED AREAS, RESIST-IMAGE FORMATION BEING EFFECTED BY SOLVENT TREATMENT OF THE POLYMER COATING.
Inventors
- 👤 Albert S Deutsch
- 👤 William G Herrick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 11:48
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; C; C23; C23F; C23F1/00; C23F1/02; G03F7/027; G03F7/032; G03F7/033; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-07-19 | 1975-01-18 | 1975-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-07-19 | 1979-01-18 | 1979-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-07-19 | 1983-01-18 | 1983-07-20 | $7700.00 | Window Closed / Lapsed |