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US3594243A Expired / Lapsed US ⏱️ 0.0 years remaining

Formation of polymeric resists

Assignee: GAF Chemicals Corp
•
Filing: 1967-02-07
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Granted: 1971-07-20
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Expires: 1987-02-07
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Abstract

Abstract POLYMERIC RESIST-IMAGE FORMATION INVOLVING THE IRRADIATION OF A MALEIC ANHYDRIDE POLYMER COATING WITH CORPUSCULAR RADIATION, E.B., AN ELECTRON BEAM, WHEREBY TO INSOLUBILIZE THE EXPOSED AREAS, RESIST-IMAGE FORMATION BEING EFFECTED BY SOLVENT TREATMENT OF THE POLYMER COATING.

Inventors

  • 👤 Albert S Deutsch
  • 👤 William G Herrick

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 13:22
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; C; C23; C23F; C23F1/00; C23F1/02; G03F7/027; G03F7/032; G03F7/033; H; H10; H10P; H10P95/00

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-07-19 1975-01-18 1975-07-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-07-19 1979-01-18 1979-07-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-07-19 1983-01-18 1983-07-20 $7700.00 Window Closed / Lapsed

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