US3764898A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Methods of testing the continuity of an electrical conductor by use of an electron beam
Assignee: International Business Machines Corp
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Filing: 1972-05-12
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Granted: 1973-10-09
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Expires: 1992-05-12
Abstract
Abstract A non-contact method of testing the electrical continuity of a conductor line. At least one end of the conductor line is bombarded with a beam of electrons. A collector is positioned in spaced proximate relation to this end of the line to control the raising of the potential at this end to a particular level due to secondary emission. Current flows through the line which is measured to indicate the state of continuity in the line.
Inventors
- 👤 H Bohlen
- 👤 H Engelke
- 👤 J Landrock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 20:04
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/305; G01R31/306; G01R31/50; G01R31/52; G01R31/54
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
107 words
A non-contact method of testing the electrical continuity of a conductor line comprising the steps of: bombarding at least one end of the conductor line with a beam of electrons, positioning a first collector at a predetermined potential level in a spaced proximate position with respect to said one end of the conductor line, raising the potential at said one end by electron beam bombardment, and controlling the secondary emission at a predetermined level by said first collector so that current flows through the conductor line, and measuring the current flow at the other end of the conductor line to determine the electrical continuity of the line.
Claim 2
Dependent Claim
107 words
A non-contact method of testing the electrical continuity of a conductor line comprising the steps of: bombarding at least one end of the conductor line with a beam of electrons, positioning a first collector at a predetermined potential level in a spaced proximate position with respect to said one end of the conductor line, raising the potential at said one end by electron beam bombardment, and controlling the secondary emission at a predetermined level by said first collector so that current flows through the conductor line, and measuring the current flow at the other end of the conductor line to determine the electrical continuity of the line.
Claim 3
Dependent Claim
67 words
The method of claim 1 and further comprising the steps of: positioning a second collector in a spaced proximate position with respect to the other end of the conductor line, applying a voltage between the two collectors, bombarding both ends of the conductor line with electron beams, and determining if a state of balance exists at the two conductor ends indicative of electrical continuity in the line.
Claim 4
Dependent Claim
27 words
The method of claim 2, wherein the measuring of the current flow through the line Is determined by monitoring the current flow to one of the collectors.
Claim 5
Dependent Claim
54 words
The method of claim 3, wherein the voltage applied between the collectors is maintained at a constant level and the intensity of one of the electron beams bombarding one end of the line is varied and the current flow to the collector positioned with respect to the other end of the line is monitored.
Claim 6
Dependent Claim
35 words
The method of claim 3, wherein the voltage applied between the collectors is an AC voltage and the current flow through the line is ascertained by monitoring the AC current to one of the collectors.
Claim 7
Dependent Claim
41 words
The method of claim 5, wherein the intensity of one of the electron beams bombarding one end of the line is varied and the AC current to the collector positioned with respect to the other end of the line is monitored.
Claim 8
Dependent Claim
66 words
The method of claim 2 and further comprising the step of: controlling the access of the electron beams to the ends of said conductor line by providing a target mask having spaced apart openings aligned with the ends of said lines; said target mask including said collectors electrically isolated from one another; and positioning said target mask with said openings superimposed of said conductor line ends.
Claim 9
Dependent Claim
30 words
The method of claim 7 wherein the target mask includes a conductive layer electrically isolated from the collectors with the conductive layer acting to screen the electrons from the beams.
Claim 10
Dependent Claim
33 words
The method of claim 8, and further comprising the step of: applying a bias to the conductive layer to facilitate the collecting of secondary electrons emitted to the collectors from said conductor ends.
Claim 11
Dependent Claim
127 words
A non-contact method of testing the electrical continuity of conductor lines interconnecting semiconductor chips and the access lines to the chips in a plural chip integrated circuit package, comprising the steps of: positioning a target mask having a plurality of collectors electrically isolated from one another and corresponding to the number of chips in spaced proximate and aligned relationship to the chips, selectively and sequentially bombarding at least one end of each of the conductor lines with a beam of electrons to raise the potential at the bombarded end, and controlling the secondary emission by said collectors to enable current to flow through the selected line, and measuring the current flow at the other end of the selected line to determine the electrical continuity of that line.
Claim 12
Dependent Claim
127 words
A non-contact method of testing the electrical continuity of conductor lines interconnecting semiconductor chips and the access lines to the chips in a plural chip integrated circuit package, comprising the steps of: positioning a target mask having a plurality of collectors electrically isolated from one another and corresponding to the number of chips in spaced proximate and aligned relationship to the chips, selectively and sequentially bombarding at least one end of each of the conductor lines with a beam of electrons to raise the potential at the bombarded end, and controlling the secondary emission by said collectors to enable current to flow through the selected line, and measuring the current flow at the other end of the selected line to determine the electrical continuity of that line.
Claim 13
Dependent Claim
57 words
The method of testing of claim 10, and further comprising the steps of: applying a voltage between the collectors associated with the selected line, bombarding both ends of the selected line with electron beams, and determining if a state of balance exists at the ends of the selected conductor line indicative of electrical continuity in the line.
Claim 14
Dependent Claim
35 words
The method of testing of claim 11, wherein the measuring of the current flow through the selected line is determined by monitoring the current flow to one of the collectors associated with the selected line.
Claim 15
Dependent Claim
22 words
The method of claim 12, wherein the applied voltage is constant and the intensity of one of the electron beams is varied.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-10-08 | 1977-04-09 | 1977-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-10-08 | 1981-04-09 | 1981-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-10-08 | 1985-04-09 | 1985-10-09 | $7700.00 | Window Closed / Lapsed |