US3753805A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing planar, double-diffused semiconductor devices
Assignee: Siemens AG
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Filing: 1968-02-19
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Granted: 1973-08-21
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Expires: 1988-02-19
Abstract
Abstract Described is method of producing double-diffused semiconductor devices, preferably of germanium, having at least three zones of alternately different conductance. These zones are produced by indiffusion of dopants, into the semiconductor body in accordance with the steps of the planar technique. The process is characterized by applying at least two insulating layers, which resist the diffusion temperature, to the surface of the semiconductor body prior to the diffusion. The combination of said insulating layers is so selected that they show variable masking properties with respect to the substances to be indiffused and may be comprised of a SiO2 layer and a Si3N4 layer.
Inventors
- 👤 W Meer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:12
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/345; C23C16/40; C23C16/401; C23C16/402; H10D; H10D99/00; H10P; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/923
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
18 words
The method of claim 1, wherein the Si3N4 layer is applied to a thickness of 0.05 Mu .
Claim 2
Dependent Claim
26 words
The method of claim 1, wherein the indiffusion into the semiconductor body of the dopant determining the respective zones is effected in a single method step.
References Cited (Backward Citations)
US3331716A
Cited
US3342650A
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US3388000A
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US3477886A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-08-20 | 1977-02-19 | 1977-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-08-20 | 1981-02-19 | 1981-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-08-20 | 1985-02-19 | 1985-08-21 | $7700.00 | Window Closed / Lapsed |