Camera tube having a semiconductor target with pn mosaic regions covered by a continuous perforated conductive layer

Claim 1

A television camera tube comprising an envelope and within the envelope an electron beam source, and a radiation-responsive target having a surface positioned to intercept said electron beam, and means to scan said target with said beam, said target comprising a substrate of semi-conductive material of one conductivity type and having a plurality of projecting regions on the side facing the electron source having portions or another conductivity type forming with the material of the first conductivity type rectifying junctions, said projecting regions being separated from one another by grooves on the side of said target exposed to the electron beam, each of said projecting regions have a layer of insulating material thereon, each said layer being apertured above each said portion and having thereon a conductive layer substantially coextensive therewith and in contact with said portion through said aperture, said insulative and conductive layers projecting laterally above said grooves and defining with said substrate hollow spaces, an insulating coating covering the walls of said grooves, and a conductive coating on the bottom of each groove covering a portion of said insulating coating, said conductive coating forming a grid in the network of grooves.