US3564309A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Camera tube having a semiconductor target with pn mosaic regions covered by a continuous perforated conductive layer
Assignee: US Philips Corp
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Filing: 1969-11-10
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Granted: 1971-02-16
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Expires: 1989-11-10
Abstract
Abstract The invention relates to a camera tube having a photosensitive target plate to be scanned by an electron beam and formed by a semiconductor plate which on the side to be scanned is provided with a mosaic of regions which form a rectifying junction with or in the semiconductor plate, and in which on the said side, an apertured insulating layer is provided at the area of the regions and is covered by a conductive layer. In order to permit the target plate to be manufactured simply and cheaply, cavities are provided in the semiconductor plate at the area of the regions. Furthermore, a further insulating layer may be provided on the conductive layer and a further conductive layer may be provided on the further insulating layer so as to improve the effect of the camera tube.
Inventors
- 👤 Arthur Marie Eugen Hoeberechts
- 👤 Dirk De Nobel
- 👤 Paul Anton Herman Hart
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:07
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/20; H01J9/233; H01J29/00; H01J29/02; H01J29/10; H01J29/36; H01J29/39; H01J29/45; H01J29/451; H01J29/453; H10; H10D; H10D99/00; H10P; H10P14/00; H10P14/40; H10P14/46; H10P14/47; H10P95/00; H10W; H10W74/00; H10W74/40; H10W74/43; Y; Y10; Y10S; Y10S148/00; Y10S148/026; Y10S148/05; Y10S148/139; Y10S257/00; Y10S257/917
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
142 words
A camera tube having an electron source and a photosensitive target to be scanned by an electron beam from said source and formed by a semiconductor plate which on the side to be scanned by the electron beam is provided with a mosaic of regions separated from each other and each constituting a rectifying junction with the part of the one conductivity type of the semiconductor plate adjoining said regions, termed the substrate, an insulating layer having apertures at the areas of the regions being provided on the substrate, on the said side of the semiconductor plate said insulating layer being covered by a conductive layer, characterized in that at the areas of the apertures in the insulating layer from the surface of the semiconductor plate, cavities extend into but not through the plate, said cavities extending laterally below the insulating layer.
Claim 2
Dependent Claim
142 words
A camera tube having an electron source and a photosensitive target to be scanned by an electron beam from said source and formed by a semiconductor plate which on the side to be scanned by the electron beam is provided with a mosaic of regions separated from each other and each constituting a rectifying junction with the part of the one conductivity type of the semiconductor plate adjoining said regions, termed the substrate, an insulating layer having apertures at the areas of the regions being provided on the substrate, on the said side of the semiconductor plate said insulating layer being covered by a conductive layer, characterized in that at the areas of the apertures in the insulating layer from the surface of the semiconductor plate, cavities extend into but not through the plate, said cavities extending laterally below the insulating layer.
Claim 3
Dependent Claim
39 words
A camera tube as claimed in claim 1, characterized in that the regions comprise metal layers which are provided in the cavities and that the rectifying junctions are formed by Schottky junctions between said metal layers and the substrate.
Claim 4
Dependent Claim
41 words
A camera tube as claimed in claim 2, characterized in that the regions comprise semiconductor zones of the opposite conductivity type which adjoin the cavities and in which the rectifying junctions are the PN junctions between said zones and the substrate.
Claim 5
Dependent Claim
22 words
A camera tube as claimed in claim 1 characterized in that the depth of the cavities is at least 1 Mu m.
Claim 6
Dependent Claim
33 words
A camera tube as claimed in claim 1, characterized in that the conductive layer on the insulating layer is covered by a further insulating layer on which a further conductive layer is provided.
Claim 7
Dependent Claim
33 words
A camera tube as claimed in claim 5, characterized in that the conductive layer is a metal layer and the further insulating layer consists of an oxidized surface layer of this metal layer.
Claim 8
Dependent Claim
23 words
A camera tube as claimed in claim 6, characterized in that each region comprises a part of metal, which entirely fills a cavity.
Claim 9
Dependent Claim
22 words
A camera tube as claimed in claim 7, characterized in that the metal part extends laterally to over the further insulating layer.
Claim 10
Dependent Claim
28 words
A camera tube as claimed in claim 8, characterized in that the further conductive layer is a poorly conductive layer which is also provided over the metal parts.
Claim 11
Dependent Claim
110 words
A photosensitive target formed by a semiconductor plate provided on one side with a mosaic of regions separated from each other, and each forming a rectifying junction with the part of the one conductivity type of the semiconductor plate adjoining said regions, termed the substrate, an insulating layer having apertures at the areas of the regions being provided on the substrate on the said side of the semiconductor plate, said insulating layer being covered by a conductive layer, characterized in that at the areas of the apertures from the surface of the semiconductor plate, cavities extend into but not through the plate, said cavities extending laterally below the insulating layer.
Claim 12
Dependent Claim
110 words
A photosensitive target formed by a semiconductor plate provided on one side with a mosaic of regions separated from each other, and each forming a rectifying junction with the part of the one conductivity type of the semiconductor plate adjoining said regions, termed the substrate, an insulating layer having apertures at the areas of the regions being provided on the substrate on the said side of the semiconductor plate, said insulating layer being covered by a conductive layer, characterized in that at the areas of the apertures from the surface of the semiconductor plate, cavities extend into but not through the plate, said cavities extending laterally below the insulating layer.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-15 | 1974-08-17 | 1975-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-15 | 1978-08-17 | 1979-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-15 | 1982-08-17 | 1983-02-16 | $7700.00 | Window Closed / Lapsed |