Photographic recorder for die sorting system

Claim 1

An improved die sorting system of the type wherein a monolithic wafer of semiconductor devices mounted on an XY table is tested by incrementally moving the XY table with respect to a probe, a test set connected to the probe generates a coded signal representing the operating characteristics of the semiconductor device in registration with the probe, wherein the improvement comprises: a. a first light conduit rigidly secured to the XY table, said first light conduit having first and second ends; b. a second light conduit rigidly secured to the XY table in spaced parallel relationship to said first light conduit, said second light conduit having first and second ends; c. a reference light source mounted to said first light conduit at the first end thereof for providing a reference focusing image; d. an array of coded light sources; e. a matrix of light pipes operatively connected to said array of coded light sources and said second light conduit at the first end thereof, one of each said light pipes connected to one of each said coded light sources; f. a beam splitter operatively connected to said first and second light conduits at the second end thereof; g. support means; h. a photosensitive recording stratum mounted on said support means; i. a lens optically coupled to said beam splitter; j. a power encoder operatively connected to the test set and said coded light sources, said power encoder generating command signals in response to said coded signals for energizing selected ones of said coded light sources, energized ones of said coded light sources presenting an illuminated coded pattern which is optically coupled to said photosensitive stratum via said second light conduit, beam splitter and lens; k. said photosensitive stratum being in fixed spaced relationship with the probe, said first light conduit said second light conduit, said reference light sources, said array of coded light sources, said matrix of light pipes, said beam splitter and said lens being in fixed spaced relationship with the XY table and movable in unison therewith, one of each of the illuminated coded pattern representing the operating characteristics of one of each of the semiconductor devices, the arrangement of illuminated coded patterns recorded on said photosensitive stratum corresponding to the arrangement of semiconductor devices in the monolithic wafer.