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Deep depletion semiconductor device with surface inversion preventing means

Assignee: US Philips Corp
•
Filing: 1970-06-24
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Granted: 1972-07-18
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Expires: 1990-06-24
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Abstract

Abstract A semiconductor device, for example, a deep-depletion field effection traNsistor, in which the formation of an inversion layer below an electrode provided on an insulating layer is counteracted by a rectifying contact preferably connected to said electrode, as a result of which minority charge carriers below the electrode layer are removed. As a result of this a depletion zone formed by the electrode potential in a semiconductor layer situated below the electrode can expand without hindrance to influence a current path in the semiconductor layer.

Inventors

  • 👤 Theodorus Joannes Tulp
  • 👤 Johannes Arnoldus Appels
  • 👤 Else Kooi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 00:11
CPC Classifications
H; H10; H10D; H10D99/00; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10W; H10W10/00; H10W10/01; H10W10/061; H10W10/10; H10W10/181; H10W10/051; H10W10/50

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 235 words
A semiconductor insulated gate field-effect transistor comprising a semiconductor body having a layer-shaped region of a first conductivity type adjoining a surface of the body, spaced source and drain electrodes at the said body surface forming a main current path therebetween in the layer-shape region and adjacent the said surface, an electrically insulating layer on at least part of said surface, a gate electrode layer on said insulating layer and over the main current path in said layershaped region, means for applying to said gate electrode layer a potential relative to the source electrode and tending to establish a depletion zone in said layer-shaped region extending inward from the said surface in order to modify the electric resistance of the main current path of said layer-shaped region in a direction parallel to the surface, and means for preventing the formation of an inversion layer below the electrode layer inhibiting the inward extension of said depletion zone, said inversion layer preventing means comprising a rectifying contact to the layer-shaped region and located outside the main current path between the source and drain but substantially within a minority carrier diffusion length of where the inversion layer may be formed, means for applying to the said rectifying contact a reverse bias for draining generated minority carriers from said layer-shaped region thereby preventing the formation of said inversion layer, and means for applying a control voltage to the gate.
Claim 2
Dependent Claim 235 words
A semiconductor insulated gate field-effect transistor comprising a semiconductor body having a layer-shaped region of a first conductivity type adjoining a surface of the body, spaced source and drain electrodes at the said body surface forming a main current path therebetween in the layer-shape region and adjacent the said surface, an electrically insulating layer on at least part of said surface, a gate electrode layer on said insulating layer and over the main current path in said layershaped region, means for applying to said gate electrode layer a potential relative to the source electrode and tending to establish a depletion zone in said layer-shaped region extending inward from the said surface in order to modify the electric resistance of the main current path of said layer-shaped region in a direction parallel to the surface, and means for preventing the formation of an inversion layer below the electrode layer inhibiting the inward extension of said depletion zone, said inversion layer preventing means comprising a rectifying contact to the layer-shaped region and located outside the main current path between the source and drain but substantially within a minority carrier diffusion length of where the inversion layer may be formed, means for applying to the said rectifying contact a reverse bias for draining generated minority carriers from said layer-shaped region thereby preventing the formation of said inversion layer, and means for applying a control voltage to the gate.
Claim 3
Dependent Claim 43 words
A semiconductor device as claimed in claim 1 wherein the layer-shaped region has such a thickness and doping concentration and the potential applied to the gate electrode layer is such that the depletion zone can extend throughout the thickness of said layer-shaped region.
Claim 4
Dependent Claim 20 words
A semiconductor device as claimed in claim 1 wherein the rectifying contact is directly d.c. connected to the electrode layer.
Claim 5
Dependent Claim 38 words
A semiconductor device as claimed in claim 1 wherein the rectifying contact comprises a metal layer Provided on the layer-shaped region of the first conductivity type, said metal layer forming a rectifying metal-semiconductor contact with said layer-shaped region.
Claim 6
Dependent Claim 46 words
A semiconductor device as claimed in claim 4 wherein the electrode layer comprises a metal which forms a rectifying contact with the layer-shaped region of the first conductivity type and the said electrode layer adjoins the said layer-shaped region through an aperture in the insulating layer.
Claim 7
Dependent Claim 30 words
A semiconductor device as claimed in claim 1 wherein the rectifying contact comprises a surface zone of the second conductivity type adjoining the layer-shaped region of the first conductivity type.
Claim 8
Dependent Claim 28 words
A semiconductor device as claimed in claim 6 wherein the electrode layer adjoins the said zone of the second conductivity type through an aperture in the insulating layer.
Claim 9
Dependent Claim 28 words
A semiconductor device as claimed in claim 1 wherein the layer-shaped region of the first conductivity type comprises a monocrystalline semiconductor layer provided on an electrically insulating substrate.
Claim 10
Dependent Claim 51 words
A semiconductor device as claimed in claim 1 wherein the source and drain electrodes are formed by zones of the first conductivity type adjoining the surface, said last-named zones extending throughout the thickness of the layer-shaped region of the first conductivity type and having a higher doping than said layer-shaped region.
Claim 11
Dependent Claim 214 words
A semiconductor device comprising a body having a substrate and on the substrate a layer-shaped semiconductor region of a first conductivity type adjoining a surface of the body and electrically insulated from the substrate, an electrically insulating layer on at least part of said surface, plural semiconductor circuit elements in the layer-shaped region, an annular electrode layer on said insulating layer and over said layer-shaped region and substantially entirely surrounding at least one of the circuit elements, means for applying to said electrode layer a potential tending to establish a depletion zone in said layer-shaped region extending inward from the said surface throughout the thickness of said layer to isolate the said one circuit element from neighboring circuit elements, and means for preventing the formation of an inversion layer below the electrode layer inhibiting the inward extension of said depletion zone, said inversion layer preventing means comprising a rectifying contact to the layer-shaped region substantially within a minority carrier diffusion length of where the inversion layer may be formed, and means for applying to the said rectifying contact a reverse bias for draining generated minority carriers from said layer-shaped region thereby preventing the formation of said inversion layer, said rectifying contact having a relatively small lateral extent compared with that of the electrode layer.
Claim 12
Dependent Claim 214 words
A semiconductor device comprising a body having a substrate and on the substrate a layer-shaped semiconductor region of a first conductivity type adjoining a surface of the body and electrically insulated from the substrate, an electrically insulating layer on at least part of said surface, plural semiconductor circuit elements in the layer-shaped region, an annular electrode layer on said insulating layer and over said layer-shaped region and substantially entirely surrounding at least one of the circuit elements, means for applying to said electrode layer a potential tending to establish a depletion zone in said layer-shaped region extending inward from the said surface throughout the thickness of said layer to isolate the said one circuit element from neighboring circuit elements, and means for preventing the formation of an inversion layer below the electrode layer inhibiting the inward extension of said depletion zone, said inversion layer preventing means comprising a rectifying contact to the layer-shaped region substantially within a minority carrier diffusion length of where the inversion layer may be formed, and means for applying to the said rectifying contact a reverse bias for draining generated minority carriers from said layer-shaped region thereby preventing the formation of said inversion layer, said rectifying contact having a relatively small lateral extent compared with that of the electrode layer.
Claim 13
Dependent Claim 40 words
A semiconductor device as claimed in claim 10 wherein plural spaced rectifying contacts are provided and spaced apart a distance of at most two diffusion lengths of the minority charge carriers in the layer-shaped region of the first conductivity type.

References Cited (Backward Citations)

US3385731A Cited
US3576392A Cited
US3535600A Cited
US3560815A Cited
US3566219A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1975-07-18 1976-01-17 1976-07-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1979-07-18 1980-01-17 1980-07-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1983-07-18 1984-01-17 1984-07-18 $7700.00 Window Closed / Lapsed

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